Synthesis and Lithographic Patterning of Polycarbosilanes with Pendant Cobalt Carbonyl Clusters

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Bibliographic Details
Published inMacromolecules Vol. 38; no. 6; pp. 2023 - 2026
Main Authors Greenberg, Sharonna, Clendenning, Scott B, Liu, Kun, Manners, Ian, Aouba, Stéphane, Ruda, Harry E
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 22.03.2005
Subjects
Applied sciences
Exact sciences and technology
Inorganic and organomineral polymers
Physicochemistry of polymers
Preparation
Ring opening polymerization
Resolving power
Silane copolymer
Four membered ring
Silicon heterocycle
Electron beam lithography
Cobalt Carbonyl Complexes
Organometallic copolymer
Complex catalyst polymerization
Experimental study
Negative resist
Lateral group
Chemical modification
Preparation
Dinuclear complex
Methylene copolymer
Electroresist
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More Information
ISSN:0024-9297
1520-5835
DOI:10.1021/ma048368u