Selective Deposition of PdO Nanoparticles on Si Nanodevices for Hydrogen Sensing

In this paper, we present a method, involving plasma-enhanced atomic layer deposition and constant-power device-localized Joule heating (DLJH), for the selective deposition of palladium oxide (PdO) nanoparticles at the n– region of n+/n–/n+ polysilicon nanobelt (PNB) devices. These PdO-decorated PNB...

Full description

Saved in:
Bibliographic Details
Published inACS applied nano materials Vol. 6; no. 12; pp. 10365 - 10374
Main Authors Lin, Yu-Sheng, Wu, Cheng-Yen, Pan, Fu-Ming, Sheu, Jeng-Tzong
Format Journal Article
LanguageEnglish
Published American Chemical Society 23.06.2023
Subjects
polysilicon nanobelt
selective deposition
relative humidity
hydrogen sensing
palladium oxide
device-localized Joule heating
plasma-enhanced atomic layer deposition
Online AccessGet full text

Cover

More Information
Summary:In this paper, we present a method, involving plasma-enhanced atomic layer deposition and constant-power device-localized Joule heating (DLJH), for the selective deposition of palladium oxide (PdO) nanoparticles at the n– region of n+/n–/n+ polysilicon nanobelt (PNB) devices. These PdO-decorated PNB devices were then operated under DLJH so that the temperature of the n– region was maintained during the sensing of H2 gas. From their measured responses, the devices operated at a temperature of 339 K exhibited the most reactive interactions between PdO and H2. Considering the possibility of humidity interference, we also characterized the PdO-decorated PNB devices for H2 sensing at various relative humidities. The PdO nanoparticles on the PNB devices having a grain distance that sustained a spillover effect were almost immune to RH interference.
ISSN:2574-0970
2574-0970
DOI:10.1021/acsanm.3c01289