Patterning of SnO2 Thin Films by Combination of Lithographic Photoirradiation and Pyrolysis of an Organotin Polymer
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Published in | Chemistry of materials Vol. 9; no. 12; pp. 2674 - 2675 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Washington, DC
American Chemical Society
16.12.1997
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Subjects | |
Online Access | Get full text |
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Bibliography: | ark:/67375/TPS-ZX9CS5NR-R istex:2B81B6F81CE778B20E10B79F2B155F18D990D714 |
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ISSN: | 0897-4756 1520-5002 |
DOI: | 10.1021/cm970276e |