Handbook of Contamination Control in Microelectronics - Principles, Applications and Technology

Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across al...

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Bibliographic Details
Main Author Tolliver, Donald L.
Format eBook Book
LanguageEnglish
Published Park Ridge, N.J., U.S.A William Andrew Publishing/Noyes 1988
Noyes Publications
Elsevier Science & Technology Books
Edition1
Subjects
Contamination (Technology)
Design and construction
Electronics & Semiconductors
Integrated circuits
Integrated circuits > Design and construction
Manufacture & Processing
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Summary:Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control.
Bibliography:Includes bibliographies and index
ISBN:9780815511519
0815511515