Fundamental principles of engineering nanometrology

• Main Author: Leach, R. K.
• Format: Electronic eBook
• Language: English
• Published: Oxford : Amsterdam : William Andrew ; Elsevier Science, ©2010.
• Edition: 1st ed.
• Series: Micro & nano technologies.
• Subjects: Nanotechnology.; Microtechnology.; Metrology.; elektronické knihy; electronic books

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...