Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI)

• Other Authors: McGuire, G. E.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J. : Noyes Publicatons, c1988.
• Series: Materials science and process technology series.
• Subjects: Integrated circuits > Very large scale integration > Design and construction > Handbooks, manuals, etc.; elektronické knihy; electronic books

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.