Handbook of contamination control in microelectronics principles, applications, and technology

• Other Authors: Tolliver, Donald L.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1988.
• Series: Materials science and process technology series.
• Subjects: Integrated circuits > Design and construction.; Contamination (Technology); elektronické knihy; electronic books

Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across al...