APA (7th ed.) Citation

(2021). Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures.

Chicago Style (17th ed.) Citation

Defect Discovery and Recipe Optimization for Inspection of Three-dimensional Semiconductor Structures. 2021.

MLA (9th ed.) Citation

Defect Discovery and Recipe Optimization for Inspection of Three-dimensional Semiconductor Structures. 2021.

Warning: These citations may not always be 100% accurate.