Method of making an MIM capacitor and MIM capacitor structure formed thereby

• Main Authors: Booth, Jr, Roger Allen, Cheng, Kangguo
• Format: Patent
• Language: English
• Published: 16.10.2012

A method of forming an MIM capacitor having interdigitated capacitor plates. Metal and dielectric layers are alternately deposited in an opening in a layer of insulator material. After each deposition of the metal layer, the metal layer is removed at an angle from the side to form the capacitor plat...