Wafer center finding with charge-coupled devices

A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substanti...

Full description

Saved in:
Bibliographic Details
Main Authors Kiley, Christopher C, van der Meulen, Peter, Buzan, Forrest T, Fogel, Paul E
Format Patent
LanguageEnglish
Published 28.08.2012
Online AccessGet full text

Cover

Abstract A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.
AbstractList A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.
Author Buzan, Forrest T
van der Meulen, Peter
Fogel, Paul E
Kiley, Christopher C
Author_xml – sequence: 1
  givenname: Christopher C
  surname: Kiley
  fullname: Kiley, Christopher C
– sequence: 2
  givenname: Peter
  surname: van der Meulen
  fullname: van der Meulen, Peter
– sequence: 3
  givenname: Forrest T
  surname: Buzan
  fullname: Buzan, Forrest T
– sequence: 4
  givenname: Paul E
  surname: Fogel
  fullname: Fogel, Paul E
BookMark eNrjYmDJy89L5WQwCE9MSy1SSE7NKwFSaZl5KZl56QrlmSUZCskZiUXpqbrJ-aUFOakpCimpZZnJqcU8DKxpiTnFqbxQmptBwc01xNlDt7S4ILEEaExxfHpRIogysDAyNbY0sTAmQgkAHWct6A
ContentType Patent
CorporateAuthor Brooks Automation, Inc
CorporateAuthor_xml – name: Brooks Automation, Inc
DBID EFH
DatabaseName USPTO Issued Patents
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EFH
  name: USPTO Issued Patents
  url: http://www.uspto.gov/patft/index.html
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 08253948
GroupedDBID EFH
ID FETCH-uspatents_grants_082539483
IEDL.DBID EFH
IngestDate Sun Mar 05 22:34:08 EST 2023
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-uspatents_grants_082539483
OpenAccessLink https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8253948
ParticipantIDs uspatents_grants_08253948
PatentNumber 8253948
PublicationCentury 2000
PublicationDate 20120828
PublicationDateYYYYMMDD 2012-08-28
PublicationDate_xml – month: 08
  year: 2012
  text: 20120828
  day: 28
PublicationDecade 2010
PublicationYear 2012
References Nangoy (7433759) 20081000
Oppenheimer et al. (5982492) 19991100
Nioonahad et al. (2004/0032581) 20040200
Pasquailini et al. (7591597) 20090900
Del Porto et al. (2003/0082466) 20030500
Fogel (2008/0135788) 20080600
Hofmeister et al. (2004/0067127) 20040400
Lu (2004/0151574) 20040800
Shinichi (6856858) 20050200
Shmookler et al. (5483138) 19960100
Cheng (5546179) 19960800
Cheng et al. (4819167) 19890400
Shimazaki et al. (5917601) 19990600
van der Meulen et al. (2008/0232948) 20080900
Uhlmann (6092033) 20000700
Johanson et al. (6405101) 20020600
Das et al. (6190037) 20010200
Scaduto (6429936) 20020800
Pryor (4570065) 19860200
Yoo et al. (2002/0103571) 20020800
Moy et al. (5331232) 19940700
Kiley et al. (2008/0145194) 20080600
Matsushima (6339730) 20020100
Astegno et al. (2004/0091343) 20040500
Nisson et al. (6476574) 20021100
Mooring et al. (6502054) 20021200
Ramsey et al. (7283255) 20071000
References_xml – year: 19860200
  ident: 4570065
  contributor:
    fullname: Pryor
– year: 20040400
  ident: 2004/0067127
  contributor:
    fullname: Hofmeister et al.
– year: 20081000
  ident: 7433759
  contributor:
    fullname: Nangoy
– year: 20040500
  ident: 2004/0091343
  contributor:
    fullname: Astegno et al.
– year: 20020800
  ident: 6429936
  contributor:
    fullname: Scaduto
– year: 20071000
  ident: 7283255
  contributor:
    fullname: Ramsey et al.
– year: 20090900
  ident: 7591597
  contributor:
    fullname: Pasquailini et al.
– year: 20080900
  ident: 2008/0232948
  contributor:
    fullname: van der Meulen et al.
– year: 19991100
  ident: 5982492
  contributor:
    fullname: Oppenheimer et al.
– year: 20020600
  ident: 6405101
  contributor:
    fullname: Johanson et al.
– year: 20021200
  ident: 6502054
  contributor:
    fullname: Mooring et al.
– year: 20050200
  ident: 6856858
  contributor:
    fullname: Shinichi
– year: 20030500
  ident: 2003/0082466
  contributor:
    fullname: Del Porto et al.
– year: 19960800
  ident: 5546179
  contributor:
    fullname: Cheng
– year: 20040800
  ident: 2004/0151574
  contributor:
    fullname: Lu
– year: 19940700
  ident: 5331232
  contributor:
    fullname: Moy et al.
– year: 20020100
  ident: 6339730
  contributor:
    fullname: Matsushima
– year: 20021100
  ident: 6476574
  contributor:
    fullname: Nisson et al.
– year: 20080600
  ident: 2008/0135788
  contributor:
    fullname: Fogel
– year: 20020800
  ident: 2002/0103571
  contributor:
    fullname: Yoo et al.
– year: 19890400
  ident: 4819167
  contributor:
    fullname: Cheng et al.
– year: 19960100
  ident: 5483138
  contributor:
    fullname: Shmookler et al.
– year: 19990600
  ident: 5917601
  contributor:
    fullname: Shimazaki et al.
– year: 20000700
  ident: 6092033
  contributor:
    fullname: Uhlmann
– year: 20010200
  ident: 6190037
  contributor:
    fullname: Das et al.
– year: 20040200
  ident: 2004/0032581
  contributor:
    fullname: Nioonahad et al.
– year: 20080600
  ident: 2008/0145194
  contributor:
    fullname: Kiley et al.
Score 2.8658316
Snippet A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality...
SourceID uspatents
SourceType Open Access Repository
Title Wafer center finding with charge-coupled devices
URI https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8253948
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfVxLSwMxEB7aIqgnRcX6Igev0d0k--i5dFkEpQfF3kp2M-ml7i77wL_vJJXixZ4CCQwTwuSbmXz5AB6liqwogxmnbLjgijJunmIsuRZayEKgKb2U0utbnH-ol1W0GkG-_wvzRWHEG_Klexq6pq89uZKu993B8534s9MIrJz6wHe1rbVZGvtMlY6cqXQM4zRw1K5Flp_CMZmglK3quz-gkZ3B0dLPnsMIqwsIPrXFljk2JA3-rbjaMNcHZV6uCHlZD80WDTPow_cSWLZ4n-d8b369aR1tZR38uiGvYELlO14Dk0WowwhjTHSpLCFkogwaGyehEEWUlFOY_mvm5sDaLZwQeAvX3xTpHUz6dsB7Asi-ePC7_wEBYHDc
link.rule.ids 230,309,786,808,891,64394
linkProvider USPTO
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfVzJTsMwEB2VglhOIECUNQeuhtR2lp6hUdiqHED0FjnxpJc2ibKI32fsoooLnCzZ0mhka_xmxs8P4FZIr-C5O2GUDWdMUsbNQvQFU1xxkXHUuZVSepv58Yd8nnvzAcSbvzArCiNWky_tXd_WXWXJlXS9rw-ercWfjUZgadQHvsplpXSii3uqdMREhluwbTDWqOhPo_gA9sgIJW1l1_6CjegQdhI7ewQDLI_B_VQFNo7hQ9JgX4vLhWM6oY4VLEKWV329RO1otAF8Ak40fX-I2cZ8umgMcSV1fxwRpzCkAh7PwBHZWI099DFQuSwIIwOpURd-MOY884J8BKM_zZz_s3YDu8ljlL4-zV4uYJ-QnJtmJw8vYdg1PV4RWnbZtd2Ib7UFc9Y
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Wafer+center+finding+with+charge-coupled+devices&rft.inventor=Kiley%2C+Christopher+C&rft.inventor=van+der+Meulen%2C+Peter&rft.inventor=Buzan%2C+Forrest+T&rft.inventor=Fogel%2C+Paul+E&rft.number=8253948&rft.date=2012-08-28&rft.externalDBID=n%2Fa&rft.externalDocID=08253948