Trench-gate LDMOS structures
MOSFET devices for RF applications that use a trench-gate in place of the lateral gate conventionally used in lateral MOSFET devices. A trench-gate provides devices with a single, short channel for high frequency gain. Embodiments of the present invention provide devices with an asymmetric oxide in...
Saved in:
| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
12.06.2012
|
| Online Access | Get full text |
Cover
Loading…
| Abstract | MOSFET devices for RF applications that use a trench-gate in place of the lateral gate conventionally used in lateral MOSFET devices. A trench-gate provides devices with a single, short channel for high frequency gain. Embodiments of the present invention provide devices with an asymmetric oxide in the trench gate, as well as LDD regions that lower the gate-drain capacitance for improved RF performance. Refinements to these TG-LDMOS devices include placing a source-shield conductor below the gate and placing two gates in a trench-gate region. These improve device high-frequency performance by decreasing gate-to-drain capacitance. Further refinements include adding a charge balance region to the LDD region and adding source-to-substrate or drain-to-substrate vias. |
|---|---|
| AbstractList | MOSFET devices for RF applications that use a trench-gate in place of the lateral gate conventionally used in lateral MOSFET devices. A trench-gate provides devices with a single, short channel for high frequency gain. Embodiments of the present invention provide devices with an asymmetric oxide in the trench gate, as well as LDD regions that lower the gate-drain capacitance for improved RF performance. Refinements to these TG-LDMOS devices include placing a source-shield conductor below the gate and placing two gates in a trench-gate region. These improve device high-frequency performance by decreasing gate-to-drain capacitance. Further refinements include adding a charge balance region to the LDD region and adding source-to-substrate or drain-to-substrate vias. |
| Author | Wilson, Peter H Sapp, Steven |
| Author_xml | – sequence: 1 givenname: Peter H surname: Wilson fullname: Wilson, Peter H – sequence: 2 givenname: Steven surname: Sapp fullname: Sapp, Steven |
| BookMark | eNrjYmDJy89L5WSQCSlKzUvO0E1PLElV8HHx9Q9WKC4pKk0uKS1KLeZhYE1LzClO5YXS3AwKbq4hzh66pcUFQPV5JcXx6UWJIMrAwtDSwszc3JgIJQAtnSYg |
| ContentType | Patent |
| CorporateAuthor | Fairchild Semiconductor Corporation |
| CorporateAuthor_xml | – name: Fairchild Semiconductor Corporation |
| DBID | EFH |
| DatabaseName | USPTO Issued Patents |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EFH name: USPTO Issued Patents url: http://www.uspto.gov/patft/index.html sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| ExternalDocumentID | 08198677 |
| GroupedDBID | EFH |
| ID | FETCH-uspatents_grants_081986773 |
| IEDL.DBID | EFH |
| IngestDate | Mon Mar 06 18:57:49 EST 2023 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-uspatents_grants_081986773 |
| OpenAccessLink | https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8198677 |
| ParticipantIDs | uspatents_grants_08198677 |
| PatentNumber | 8198677 |
| PublicationCentury | 2000 |
| PublicationDate | 20120612 |
| PublicationDateYYYYMMDD | 2012-06-12 |
| PublicationDate_xml | – month: 06 year: 2012 text: 20120612 day: 12 |
| PublicationDecade | 2010 |
| PublicationYear | 2012 |
| References | Shen et al. (6204097) 20010300 Takahashi (5389815) 19950200 Yamazaki et al. (5350937) 19940900 Jeon et al. (6489652) 20021200 Blanchard (4767722) 19880800 Kwan et al. (5665619) 19970900 Fujihira (6097063) 20000800 Baliga (6191447) 20010200 Nitta et al. (6307246) 20011000 Blanchard (4914058) 19900400 Onishi et al. (2001/0028083) 20011000 (2001-144292) 20010500 Blanchard (2002/0014658) 20020200 Hshieh et al. (6657254) 20031200 Kiml (6833585) 20041200 Shenai et al., "Monolithically integrated power MOSFET and schottky diode with improved reverse recovery characteristics," (Apr. 1990) IEEE Transactions on Electron Devices, vol. 37, No. 4, pp. 1167-1169. Kakumoto (5473176) 19951200 (1054451) 20001100 Kenney et al. (4326332) 19820400 Tihanyi (6362505) 20020300 Beilstein, Jr. et al. (5670803) 19970900 Hirler et al. (6720616) 20040400 Smayling et al. (5275961) 19940100 Jerred (6509607) 20030100 Malhi (5640034) 19970600 Technical Literature from Quester Technology, Model APT-6000 Atmospheric TEOS-Ozone CVD System, (unknown date), 4 pages total. Cardwell, Jr. (4698653) 19871000 (WO 00/68998) 20001100 Brown et al. Novel Trench Gate Structure Developments Set the Benchmark for Next Generation Power MOSFET Switching Performance. Power Electronics-May 2003 Proceedings (PCIM), Nurenburg, vol. 47, pp. 275-278. Hirler et al. (2004/0089910) 20040500 Lorenz et al., "COOL MOS-An important milestone towards a new power MOSFET generation" Power Conversion pp. 151-160 (1988). Miyajima et al. (5976936) 19991100 Corsi et al. (6104054) 20000800 Schillaci et al. (6365930) 20020400 (56-058267) 19810500 Hshieh et al. (5981344) 19991100 Murakami et al. (5430311) 19950700 Liu et al. (6163052) 20001200 Chang et al. (4324038) 19820400 Hijzen et al. (6368921) 20020400 Baliga (6365462) 20020400 Kwan et al. (5879994) 19990300 Williams et al. (5156989) 19921000 Kang (5219777) 19930600 Ogura et al. (6114727) 20000900 Deboy et al. (6388287) 20020500 Yukimoto (4337474) 19820600 So et al. (5895951) 19990400 Miller, "Power Management & Supply-Market, Applications Technologies-an Overview," Infineon Technologies, downloaded from the Internet <<http://www.ewh.ieee.org/r8/germany/ias-pels/m-regensburg/overview-miller.pdf>>, May 5, 2003, 52 pages total. Chen et al. (5595927) 19970100 D'Anna (6063678) 20000500 Williams (5814858) 19980900 Gan et al. "Poly Flanked VDMOS (PFVDMOS): A Superior Technology for Superjunction Devices," IEEE Power Electronics Specialists Conference, Jun. 17-22, 2001, Vancouver, Canada (2001), 4 pages total. Boiteux et al. (6762127) 20040700 Baba et al. (5242845) 19930900 Ludikhuize (5473180) 19951200 Tihanyi (6326656) 20011200 Hebert et al. (6222229) 20010400 Laska et al. (6309920) 20011000 Deboy et al. (6271562) 20010800 Wodarczyk et al. (5079608) 19920100 Wilson (3564356) 19710200 Kinzer et al. (6608350) 20030800 Korman et al. (5111253) 19920500 Shenoy et al."Analysis of the Effect of Charge Imbalance on the Static and Dynamic Characteristic of the Super Junction MOSFET," IEEE International Symposium on Power Semiconductor Devices 1999, pp. 99-102 (1999). Temple (4941026) 19900700 Mori (4990463) 19910200 Chi (5554552) 19960900 Fujishima (6174773) 20010100 Blanchard (2002/0009832) 20020100 Singh et al. (5719409) 19980200 Darwish et al. (2004/0121572) 20040600 Kim et al. (6087232) 20000700 Uenishi et al. (6103578) 20000800 Chen et al. (6265269) 20010700 Blanchard (2002/0066924) 20020600 Floyd et al. (5592005) 19970100 Omura et al. (6037632) 20000300 Hshieh et al. (2001/0023961) 20010900 (WO 01/59847) 20010800 Teszner et al. (3497777) 19700200 Chatterjee et al. (5208657) 19930500 Williams (6096608) 20000800 Henninger et al. (6806533) 20041000 Lim et al. (6228727) 20010500 Warner et al. (3404295) 19681000 Rumennik et al. (6168983) 20010100 Park et al., "Lateral Trench Gate Super-Junction SOI-LDMOSFETs with Low On-Resistance," Institute for Microelectronics, University of Technology Vienna, Austria (2002), pp. 283-285. Beasom (5436189) 19950700 Beasom (6368920) 20020400 Uenishi et al. (6040600) 20000300 Cogan et al. (5576245) 19961100 Baliga (4568958) 19860200 Bashir (5780343) 19980700 Sugawara (5572048) 19961100 Williams et al. (6291298) 20010900 Kawaguchi et al. (6297534) 20011000 Hisamoto et al. (5346834) 19940900 Zeng (6683346) 20040100 Mehrotra et al. (5365102) 19941100 Baliga (6313482) 20011100 Tihanyi et al. (6184555) 20010200 Shenai et al., "Current transport mechanisms in atomically abrupt metal-semiconductor interfaces," (Apr. 1988) IEEE Transactions on Electron Devices, vol. 35, No. 4, pp. 468-482. Parekh et al. (6174785) 20010100 Hine (4579621) 19860400 Kao et al. "Two Dimensional Thermal Oxidation of Silicon-II. Modeling Stress Effects in Wet Oxides," IEEE Transactions on Electron Devices, vol. ED-35, No. 1, Jan. 1988, pp. 25-37. Malhi (5326711) 19940700 Kim (5405794) 19950400 Ballantine et al. (6271100) 20010800 Mo (6274905) 20010800 Sapp (6710403) 20040300 (2001-313391) 20011200 Tokura et al. (5519245) 19960500 Nishizawa et al. (5027180) 19910600 Fujii et al. (4774556) 19880900 Baliga "New Concepts in Power Rectifiers," Physics of Semiconductor Devices, Proceedings of the Third Int'l Workshop, Madras (India), Committee on Science and Technology in Developing Countries (1985), pp. 471-481. Johnsen et al. (5134448) 19920700 Bencuya (5605852) 19970200 Wolf, "Silicon Processing for The VLSI Era" vol. 2 Process Integration Lattice Press (1990), 3 pages total. (64-022051) 19890100 Majumdar et al. (5623152) 19970400 Williams (5973367) 19991000 Tihanyi (6274904) 20010800 Huang et al. (5776813) 19980700 Witek (5879971) 19990300 Boden, Jr. (6452230) 20020900 (63-186475) 19880800 So et al. (6281547) 20010800 (4300806) 19931200 Hebert et al. (5912490) 19990600 (2000-277726) 20001000 Kubo et al. (5972741) 19991000 Bencuya (5430324) 19950700 Hshieh et al. (5639676) 19970600 Yoon et al. (6008097) 19991200 Chu (6444574) 20020900 Korec et al. (6285060) 20010900 Sakai et al., "Experimental investigation of dependence of electrical characteristics of device parameters in trench MOS barrier, schottky diodes," (1998) International Symposium on Power Semiconductors and ICs, Technical Digest, pp. 293-296. (WO 02/01644) 20020100 Pfiester (4745079) 19880500 Tihanyi (5973360) 19991000 Fratin et al. (5977591) 19991100 Tihanyi (6376890) 20020400 Meyerson (5906680) 19990500 Baliga et al. (4823176) 19890400 (2001-244461) 20010900 Kinzer et al. (2002/0070418) 20020600 Chang (4992390) 19910200 Murakami (6921942) 20050700 Goodyear et al. (5656843) 19970800 Werner et al. (6184545) 20010200 Anderson (5300447) 19940400 Ueno (5693569) 19971200 Baliga "Options for CVD of Dielectrics Include Low-k Materials," Technical Literature from Semiconductor International, Jun. 1998, 4 pages total. Buiguez et al. (4636281) 19870100 Cogan (4716126) 19871200 Shenoy et al. (7265415) 20070900 (63-288047) 19881100 Singer "Empty Spaces in Silicon (ESS): An Alternative to SOI," Semiconductor International, p. 42, Dec. 1999. Lee et al. (5250450) 19931000 Hshieh et al. (5629543) 19970500 Kassakian, J.G. et al., "High-frequency high-density converters for distributed power supply systems," (Apr. 1988) Proceedings of the IEEE, vol. 76, No. 4, pp. 362-376. Miyasaka et al. (6291856) 20010900 Baliga et al., "Improving the reverse recovery of power MOSFET integral diodes by electron irradiation," (Dec. 1983) Solid State Electronics, vol. 26, No. 12, pp. 1133-1141. (2001-015752) 20010100 Hijzen et al. (6441454) 20020800 Baliga (5998833) 19991200 Euen et al. (5268311) 19931200 Nakagawa et al. (5105243) 19920400 Hshieh et al. (6475884) 20021100 Fujihira "Theory of Semiconductor Superjunction Devices" Jpn. J. Appl. Phys. vol. 36 pp. 6254-6262 (1997). Beasom (5770878) 19980600 Chen et al. (6077733) 20000600 (05-226638) 19930900 Himelick (4853345) 19890800 Blanchard (4893160) 19900100 Baliga et al. (4961100) 19901000 D'Anna (6048772) 20000400 Berglund et al. (3660697) 19720500 Lou (6174769) 20010100 Amlinger (3412297) 19681100 Balasubramanian et al. (5767004) 19980600 Lu et al. (5943581) 19990800 Werner (6337499) 20020100 (WO 01/06550) 20010100 Williams (5616945) 19970400 Yasuhara et al. (6353252) 20020300 Chen (5216275) 19930600 Darwish et al. (5895952) 19990400 Henninger et al. (2003/0209757) 20031100 Huang (6110799) 20000800 Johnsen et al. (5023196) 19910600 (2000-040872) 20000200 Tu et al. "On the reverse blocking characteristics of schottky power diodes," (Dec. 1992) IEEE Transactions on Electron Devices, vol. 39, No. 12, pp. 2813-2814, 2 pages total. Nance et al. (6171935) 20010100 Tsang et al. (5801417) 19980900 (2000-277728) 20001000 Moghadam "Delivering Value Around New Industry Paradigms," Technical Literature from Applied Materials, pp. 1-11, vol. 1, Issue 2, Nov. 1999. Darwish (6084264) 20000700 Muraoka et al. (5418376) 19950500 Numazawa et al. (6168996) 20010100 (WO 00/68997) 20001100 Lin et al. (6734066) 20040500 Matsushita et al. (4003072) 19770100 Kinzer et al. (6194741) 20010200 Huang (6400003) 20020600 Baliga (5434435) 19950700 Michaelis (6156606) 20001200 (0975024) 20000100 Vinal et al. (5438007) 19950800 (62-069562) 19870300 Blanchard (4345265) 19820800 (WO 00/75965) 20001200 Takeda et al. (6346464) 20020200 Omura et al. (5188973) 19930200 Baliga (6388286) 20020500 Wollesen et al. (5960271) 19990900 D'Anna (6190978) 20010200 Singer et al. (4639761) 19870100 (19736981) 19980800 Djekic, O. et al., "High frequency synchronous buck converter for low voltage applications," (1998) Proc. IEEE Power Electronics Specialist Conf. (PESC), pp. 1248-1254. (01-192174) 19890800 Grung et al. (4868624) 19890900 Curtis, et al. "APCVD TEOS: 03 Advanced Trench Isolation Applications," Semiconductor Fabtech 9th Edition (1999) 8 pages total. Acovic et al. (5567635) 19961000 Kocon et al. (6188105) 20010200 D'Anna et al. (5949104) 19990900 Thapar (2001/0026989) 20011000 Cogan et al. (4967245) 19901000 Wolf et al., "Silicon Processing for The VLSI Era" vol. 1-Process Technology, Second Edition, (1990), pp. 658. Onishi et al. (2001/0050394) 20011200 Coe (4754310) 19880600 Ishikawa (6277706) 20010800 Cogan et al. (5298781) 19940300 Hshieh et al. (5578851) 19961100 Marchant (2002/0100933) 20020800 Calafut (6461918) 20021000 (WO |
| References_xml | – year: 19960900 ident: 5554862 contributor: fullname: Omura et al. – year: 19900400 ident: 4914058 contributor: fullname: Blanchard – year: 20020800 ident: 6433385 contributor: fullname: Kocon et al. – year: 19770100 ident: 4003072 contributor: fullname: Matsushita et al. – year: 20000800 ident: 6103619 contributor: fullname: Lai – year: 19880600 ident: 4754310 contributor: fullname: Coe – year: 19990900 ident: 5949104 contributor: fullname: D'Anna et al. – year: 20010400 ident: 6222229 contributor: fullname: Hebert et al. – year: 20001200 ident: WO 00/75965 – year: 20001000 ident: 2000-277728 – year: 20020500 ident: 6384456 contributor: fullname: Tihanyi – year: 19890400 ident: 4824793 contributor: fullname: Richardson et al. – year: 19930800 ident: 5233215 contributor: fullname: Baliga – year: 19681100 ident: 3412297 contributor: fullname: Amlinger – year: 19970800 ident: 5656843 contributor: fullname: Goodyear et al. – year: 20021000 ident: 6472678 contributor: fullname: Hshieh et al. – year: 19940300 ident: 5294824 contributor: fullname: Okada – year: 20040500 ident: 6734066 contributor: fullname: Lin et al. – year: 19960500 ident: 5519245 contributor: fullname: Tokura et al. – year: 19961100 ident: 5576245 contributor: fullname: Cogan et al. – year: 20011200 ident: 6326656 contributor: fullname: Tihanyi – year: 19910700 ident: 5034785 contributor: fullname: Blanchard – year: 20001100 ident: 1054451 – year: 20011000 ident: 6297534 contributor: fullname: Kawaguchi et al. – year: 20001000 ident: 6137152 contributor: fullname: Wu – year: 19901000 ident: 4967245 contributor: fullname: Cogan et al. – year: 19930600 ident: 5219777 contributor: fullname: Kang – year: 20000700 ident: 6084268 contributor: fullname: de Frésart et al. – year: 20030500 ident: 6566804 contributor: fullname: Trujillo et al. – year: 20050700 ident: 6921942 contributor: fullname: Murakami – year: 19930600 ident: 5216275 contributor: fullname: Chen – year: 19980600 ident: 5767004 contributor: fullname: Balasubramanian et al. – year: 19820400 ident: 4324038 contributor: fullname: Chang et al. – year: 19910600 ident: 5027180 contributor: fullname: Nishizawa et al. – year: 20010500 ident: 2001-135819 – year: 20020300 ident: 6362112 contributor: fullname: Hamerski – year: 20050100 ident: 2005/0017293 contributor: fullname: Zundel et al. – year: 20000200 ident: 2000-040872 – year: 19981000 ident: 5821583 contributor: fullname: Hshieh et al. – year: 20020300 ident: 2002-083976 – year: 20020400 ident: 6376890 contributor: fullname: Tihanyi – year: 19960700 ident: 5532179 contributor: fullname: Chang et al. – year: 19991100 ident: 5981344 contributor: fullname: Hshieh et al. – year: 19820400 ident: 4326332 contributor: fullname: Kenney et al. – year: 19970600 ident: 5639676 contributor: fullname: Hshieh et al. – year: 20020600 ident: WO 02/47171 – year: 19871200 ident: 4716126 contributor: fullname: Cogan – year: 19950700 ident: 5430324 contributor: fullname: Bencuya – year: 19880800 ident: 63-186475 – year: 19950400 ident: 5405794 contributor: fullname: Kim – year: 20010100 ident: WO 01/06557 – year: 19990800 ident: 5943581 contributor: fullname: Lu et al. – year: 20031200 ident: 6657254 contributor: fullname: Hshieh et al. – year: 19970900 ident: 5670803 contributor: fullname: Beilstein, Jr. et al. – year: 19980400 ident: 5744372 contributor: fullname: Bulucea – year: 20010200 ident: 6188105 contributor: fullname: Kocon et al. – year: 20040700 ident: 6762127 contributor: fullname: Boiteux et al. – year: 19840400 ident: 4445202 contributor: fullname: Goetze et al. – year: 20000400 ident: 6051488 contributor: fullname: Lee et al. – year: 20001100 ident: WO 00/68997 – year: 20010100 ident: 6174769 contributor: fullname: Lou – year: 20010900 ident: 2001/0023961 contributor: fullname: Hshieh et al. – year: 19980600 ident: 5770878 contributor: fullname: Beasom – year: 19991100 ident: 5977591 contributor: fullname: Fratin et al. – year: 19991100 ident: 5976936 contributor: fullname: Miyajima et al. – year: 20010400 ident: 2001-111041 – year: 20030100 ident: 6509607 contributor: fullname: Jerred – year: 20011200 ident: 2001-313391 – year: 19811100 ident: 4300150 contributor: fullname: Colak – year: 20020600 ident: 2002/0066924 contributor: fullname: Blanchard – year: 20021200 ident: 6489652 contributor: fullname: Jeon et al. – year: 19970100 ident: 5593909 contributor: fullname: Han et al. – year: 20020400 ident: 6365930 contributor: fullname: Schillaci et al. – year: 20010200 ident: 6188104 contributor: fullname: Choi et al. – year: 20000900 ident: 6124608 contributor: fullname: Liu et al. – year: 19920800 ident: 5142640 contributor: fullname: Iwanatsu – year: 20020200 ident: 6346464 contributor: fullname: Takeda et al. – year: 20000300 ident: 6037202 contributor: fullname: Witek – year: 19990400 ident: 5895952 contributor: fullname: Darwish et al. – year: 19940400 ident: 5300447 contributor: fullname: Anderson – year: 20000700 ident: 6087232 contributor: fullname: Kim et al. – year: 20010400 ident: 2001-102577 – year: 20010500 ident: 2001-144292 – year: 19990400 ident: 5895951 contributor: fullname: So et al. – year: 19940200 ident: 5283201 contributor: fullname: Tsang et al. – year: 19991200 ident: 6005271 contributor: fullname: Hshieh – year: 19970100 ident: 5592005 contributor: fullname: Floyd et al. – year: 20010800 ident: 6281547 contributor: fullname: So et al. – year: 20020400 ident: 6368921 contributor: fullname: Hijzen et al. – year: 19950800 ident: 5438007 contributor: fullname: Vinal et al. – year: 20010800 ident: 6271082 contributor: fullname: Hou et al. – year: 20020400 ident: 6368920 contributor: fullname: Beasom – year: 19930900 ident: 05-226638 – year: 20020900 ident: 6452230 contributor: fullname: Boden, Jr. – year: 20000300 ident: 6040600 contributor: fullname: Uenishi et al. – year: 20010100 ident: 6168996 contributor: fullname: Numazawa et al. – year: 20020500 ident: 6388287 contributor: fullname: Deboy et al. – year: 19681000 ident: 3404295 contributor: fullname: Warner et al. – year: 20000600 ident: 6081009 contributor: fullname: Neilson – year: 19960100 ident: 5488010 contributor: fullname: Wong – year: 20010900 ident: 6285060 contributor: fullname: Korec et al. – year: 20010300 ident: 6198127 contributor: fullname: Kocon – year: 20011000 ident: 2001/0028083 contributor: fullname: Onishi et al. – year: 19970100 ident: 5595927 contributor: fullname: Chen et al. – year: 20030700 ident: 2003/0132450 contributor: fullname: Minato et al. – year: 19990300 ident: 5879994 contributor: fullname: Kwan et al. – year: 20010800 ident: 6271552 contributor: fullname: D'Anna – year: 19880800 ident: 4767722 contributor: fullname: Blanchard – year: 20000400 ident: 6048772 contributor: fullname: D'Anna – year: 20011200 ident: 2001/0050394 contributor: fullname: Onishi et al. – year: 20020200 ident: 0747967 – year: 20010700 ident: 6265269 contributor: fullname: Chen et al. – year: 20041000 ident: 6806533 contributor: fullname: Henninger et al. – year: 19980800 ident: 19736981 – year: 19980200 ident: 5714781 contributor: fullname: Yamamoto et al. – year: 19940400 ident: 5300452 contributor: fullname: Chang et al. – year: 20010800 ident: 6274905 contributor: fullname: Mo – year: 19940300 ident: 5298781 contributor: fullname: Cogan et al. – year: 20010900 ident: 2001-244461 – year: 19950700 ident: 5434435 contributor: fullname: Baliga – year: 19961000 ident: 5567634 contributor: fullname: Hebert et al. – year: 19990700 ident: 5929481 contributor: fullname: Hshieh et al. – year: 20020800 ident: 6429481 contributor: fullname: Mo et al. – year: 19860400 ident: 4579621 contributor: fullname: Hine – year: 20020800 ident: 6436779 contributor: fullname: Hurkx et al. – year: 20020100 ident: 2002/0008284 contributor: fullname: Zeng – year: 19920400 ident: 5105243 contributor: fullname: Nakagawa et al. – year: 19980900 ident: 5814858 contributor: fullname: Williams – year: 19870300 ident: 62-069562 – year: 20000300 ident: 6037632 contributor: fullname: Omura et al. – year: 19860200 ident: 4568958 contributor: fullname: Baliga – year: 19991200 ident: 6008097 contributor: fullname: Yoon et al. – year: 19820800 ident: 4345265 contributor: fullname: Blanchard – year: 20010100 ident: 6171935 contributor: fullname: Nance et al. – year: 20010600 ident: WO 01/45155 – year: 19980900 ident: 5801417 contributor: fullname: Tsang et al. – year: 20020400 ident: 6376315 contributor: fullname: Hshieh et al. – year: 20001000 ident: 2000-277726 – year: 20020900 ident: 6444574 contributor: fullname: Chu – year: 20020800 ident: 6441454 contributor: fullname: Hijzen et al. – year: 19870100 ident: 4638344 contributor: fullname: Cardwell, Jr. – year: 20000800 ident: 1026749 – year: 19921000 ident: 5156989 contributor: fullname: Williams et al. – year: 19951200 ident: 5473176 contributor: fullname: Kakumoto – year: 19931000 ident: 5252848 contributor: fullname: Adler et al. – year: 19980200 ident: 5719409 contributor: fullname: Singh et al. – year: 20010500 ident: 6239464 contributor: fullname: Tsuchitani et al. – year: 19881100 ident: 63-288047 – year: 20041200 ident: 6833585 contributor: fullname: Kiml – year: 19900700 ident: 4941026 contributor: fullname: Temple – year: 19980100 ident: 5705409 contributor: fullname: Witek – year: 20011000 ident: 2001/0026989 contributor: fullname: Thapar – year: 19700200 ident: 3497777 contributor: fullname: Teszner et al. – year: 20010100 ident: WO 01/06550 – year: 19950700 ident: 5430311 contributor: fullname: Murakami et al. – year: 20020700 ident: 6426260 contributor: fullname: Hshieh – year: 19930900 ident: 5242845 contributor: fullname: Baba et al. – year: 19970200 ident: 5605852 contributor: fullname: Bencuya – year: 20001200 ident: 6165870 contributor: fullname: Shim et al. – year: 20010900 ident: 6294818 contributor: fullname: Fujihira – year: 20000100 ident: 6015727 contributor: fullname: Wanlass – year: 20000100 ident: 6011298 contributor: fullname: Blanchard – year: 20000500 ident: 6057558 contributor: fullname: Yamamoto et al. – year: 19951200 ident: 5474943 contributor: fullname: Hshieh et al. – year: 20000800 ident: 6096608 contributor: fullname: Williams – year: 20001200 ident: 6156606 contributor: fullname: Michaelis – year: 19891000 ident: 1036666 – year: 19990500 ident: 5907776 contributor: fullname: Hshieh et al. – year: 20010100 ident: 2001-015752 – year: 19940100 ident: 5275965 contributor: fullname: Manning – year: 19940100 ident: 5281548 contributor: fullname: Prall – year: 19950700 ident: 5429977 contributor: fullname: Lu et al. – year: 20010500 ident: 6239463 contributor: fullname: Williams et al. – year: 19950500 ident: 5418376 contributor: fullname: Muraoka et al. – year: 19990400 ident: 5897343 contributor: fullname: Mathew et al. – year: 20030600 ident: 6580123 contributor: fullname: Thapar – year: 20000400 ident: 6049108 contributor: fullname: Williams et al. – year: 19971200 ident: 5693569 contributor: fullname: Ueno – year: 20000800 ident: 6104054 contributor: fullname: Corsi et al. – year: 19890900 ident: 4868624 contributor: fullname: Grung et al. – year: 20000300 ident: 6037628 contributor: fullname: Huang – year: 20000600 ident: 2000-156978 – year: 20000900 ident: 6114727 contributor: fullname: Ogura et al. – year: 19970400 ident: 5616945 contributor: fullname: Williams – year: 20000600 ident: WO 00/33386 – year: 20000800 ident: 6110799 contributor: fullname: Huang – year: 19770300 ident: 4011105 contributor: fullname: Paivinen et al. – year: 19710200 ident: 3564356 contributor: fullname: Wilson – year: 19930500 ident: 5208657 contributor: fullname: Chatterjee et al. – year: 19870100 ident: 4639761 contributor: fullname: Singer et al. – year: 19980700 ident: 5776813 contributor: fullname: Huang et al. – year: 20040300 ident: 6710403 contributor: fullname: Sapp – year: 19890400 ident: 4821095 contributor: fullname: Temple – year: 20011000 ident: 2001/0032998 contributor: fullname: Iwamoto et al. – year: 19950600 ident: 5424231 contributor: fullname: Yang – year: 20010800 ident: 6271562 contributor: fullname: Deboy et al. – year: 19880500 ident: 4746630 contributor: fullname: Hui et al. – year: 19930200 ident: 5188973 contributor: fullname: Omura et al. – year: 19980700 ident: 5780343 contributor: fullname: Bashir – year: 19871000 ident: 4698653 contributor: fullname: Cardwell, Jr. – year: 19990900 ident: 5949124 contributor: fullname: Hadizad et al. – year: 20010800 ident: WO 01/59847 – year: 20020100 ident: 6337499 contributor: fullname: Werner – year: 20021000 ident: 6465304 contributor: fullname: Blanchard et al. – year: 19921100 ident: 5164802 contributor: fullname: Jones et al. – year: 19940900 ident: 5346834 contributor: fullname: Hisamoto et al. – year: 19890100 ident: 64-022051 – year: 19900100 ident: 4893160 contributor: fullname: Blanchard – year: 20040600 ident: 2004/0121572 contributor: fullname: Darwish et al. – year: 19870600 ident: 4673962 contributor: fullname: Chatterjee et al. – year: 19970400 ident: 5623152 contributor: fullname: Majumdar et al. – year: 19890800 ident: 4853345 contributor: fullname: Himelick – year: 19930600 ident: 5219793 contributor: fullname: Cooper et al. – year: 20020100 ident: WO 02/01644 – year: 19971100 ident: 5689128 contributor: fullname: Hshieh et al. – year: 19941100 ident: 5366914 contributor: fullname: Takahashi et al. – year: 19991000 ident: 5973360 contributor: fullname: Tihanyi – year: 19961100 ident: 5578851 contributor: fullname: Hshieh et al. – year: 19950200 ident: 5389815 contributor: fullname: Takahashi – year: 20020500 ident: 1205980 – year: 19921200 ident: 5168331 contributor: fullname: Yilmaz – year: 20010200 ident: 6184555 contributor: fullname: Tihanyi et al. – year: 20001100 ident: 6150697 contributor: fullname: Teshigahara et al. – year: 20030800 ident: 6608350 contributor: fullname: Kinzer et al. – year: 19870100 ident: 4636281 contributor: fullname: Buiguez et al. – year: 20020200 ident: 6351018 contributor: fullname: Sapp – year: 20021200 ident: 6501146 contributor: fullname: Harada – year: 19990300 ident: 5879971 contributor: fullname: Witek – year: 19990300 ident: 5877528 contributor: fullname: So – year: 19911200 ident: 5072266 contributor: fullname: Buluccea – year: 19920500 ident: 5111253 contributor: fullname: Korman et al. – year: 20021000 ident: 6465843 contributor: fullname: Hirler et al. – year: 19950800 ident: 5438215 contributor: fullname: Tihanyi – year: 19970900 ident: 5665619 contributor: fullname: Kwan et al. – year: 20011200 ident: WO 01/95398 – year: 20001200 ident: 6163052 contributor: fullname: Liu et al. – year: 20010500 ident: 6225649 contributor: fullname: Minato – year: 20010200 ident: 6190978 contributor: fullname: D'Anna – year: 20021100 ident: 6476443 contributor: fullname: Kinzer – year: 19970600 ident: 5637898 contributor: fullname: Baliga – year: 20011100 ident: 6316806 contributor: fullname: Mo – year: 20110200 ident: 7893499 contributor: fullname: Denison et al. – year: 20021000 ident: 6465869 contributor: fullname: Ahlers et al. – year: 19991000 ident: 5973367 contributor: fullname: Williams – year: 19931200 ident: 5268311 contributor: fullname: Euen et al. – year: 20000800 ident: 6097063 contributor: fullname: Fujihira – year: 19991000 ident: 5972741 contributor: fullname: Kubo et al. – year: 20010100 ident: 6174773 contributor: fullname: Fujishima – year: 20020600 ident: 6400003 contributor: fullname: Huang – year: 20000600 ident: 6077733 contributor: fullname: Chen et al. – year: 19951200 ident: 5473180 contributor: fullname: Ludikhuize – year: 20011100 ident: 2001/0041400 contributor: fullname: Ren et al. – year: 20020600 ident: 2002/0070418 contributor: fullname: Kinzer et al. – year: 19880900 ident: 4774556 contributor: fullname: Fujii et al. – year: 19970700 ident: 5648670 contributor: fullname: Blanchard – year: 20070900 ident: 7265415 contributor: fullname: Shenoy et al. – year: 20011200 ident: 2001/0049167 contributor: fullname: Madson – year: 19940100 ident: 5275961 contributor: fullname: Smayling et al. – year: 20040100 ident: 6683346 contributor: fullname: Zeng – year: 19991200 ident: 5998833 contributor: fullname: Baliga – year: 19990500 ident: 5900663 contributor: fullname: Johnson et al. – year: 19970100 ident: 5597765 contributor: fullname: Yilmaz et al. – year: 20000100 ident: 0975024 – year: 20020300 ident: 6362505 contributor: fullname: Tihanyi – year: 19931100 ident: 5262336 contributor: fullname: Pike, Jr. et al. – year: 19941100 ident: 5365102 contributor: fullname: Mehrotra et al. – year: 19971100 ident: 5684320 contributor: fullname: Kawashima – year: 20020500 ident: 6388286 contributor: fullname: Baliga – year: 20000500 ident: 6066878 contributor: fullname: Neilson – year: 19961100 ident: 5572048 contributor: fullname: Sugawara – year: 19970500 ident: 5629543 contributor: fullname: Hshieh et al. – year: 20041100 ident: 6815293 contributor: fullname: Disney et al. – year: 20001100 ident: WO 00/68998 – year: 20020300 ident: 6353252 contributor: fullname: Yasuhara et al. – year: 20010100 ident: 2001-015448 – year: 19901000 ident: 4961100 contributor: fullname: Baliga et al. – year: 19990900 ident: 5960271 contributor: fullname: Wollesen et al. – year: 20040500 ident: 2004/0089910 contributor: fullname: Hirler et al. – year: 20000300 ident: 6034415 contributor: fullname: Johnson et al. – year: 19960900 ident: 5554552 contributor: fullname: Chi – year: 19920100 ident: 5079608 contributor: fullname: Wodarczyk et al. – year: 20000200 ident: 6020250 contributor: fullname: Kenney et al. – year: 20021000 ident: 6461918 contributor: fullname: Calafut – year: 20020200 ident: 6346469 contributor: fullname: Greer – year: 19810500 ident: 56-058267 – year: 19960700 ident: 5541425 contributor: fullname: Nishihara – year: 19880500 ident: 4745079 contributor: fullname: Pfiester – year: 20041100 ident: 2004/0232407 contributor: fullname: Calafut – year: 19961200 ident: 5583065 contributor: fullname: Miwa – year: 20040200 ident: 2004/0031987 contributor: fullname: Henninger et al. – year: 20010500 ident: 6228727 contributor: fullname: Lim et al. – year: 20031000 ident: 2003/0193067 contributor: fullname: Kim – year: 19910200 ident: 4990463 contributor: fullname: Mori – year: 19990600 ident: 5917216 contributor: fullname: Floyd et al. – year: 20010900 ident: 6291856 contributor: fullname: Miyasaka et al. – year: 20011100 ident: 6313482 contributor: fullname: Baliga – year: 19921100 ident: 5164325 contributor: fullname: Cogan et al. – year: 20010100 ident: 6168983 contributor: fullname: Rumennik et al. – year: 20020300 ident: 6359308 contributor: fullname: Hijzen et al. – year: 19990600 ident: 5912490 contributor: fullname: Hebert et al. – year: 20010400 ident: 6222233 contributor: fullname: D'Anna – year: 19980200 ident: 5717237 contributor: fullname: Chi – year: 20020400 ident: 6365462 contributor: fullname: Baliga – year: 20010200 ident: 6191447 contributor: fullname: Baliga – year: 19931000 ident: 5250450 contributor: fullname: Lee et al. – year: 20010200 ident: 6194741 contributor: fullname: Kinzer et al. – year: 20010800 ident: 6274904 contributor: fullname: Tihanyi – year: 20010300 ident: 6207994 contributor: fullname: Rumennik et al. – year: 20021100 ident: 6479352 contributor: fullname: Blanchard – year: 19911100 ident: 5065273 contributor: fullname: Rajeevakumar – year: 19931200 ident: 4300806 – year: 20000500 ident: 6069043 contributor: fullname: Floyd et al. – year: 19940700 ident: 5326711 contributor: fullname: Malhi – year: 19940900 ident: 5350937 contributor: fullname: Yamazaki et al. – year: 20010800 ident: 6271100 contributor: fullname: Ballantine et al. – year: 19991100 ident: 5981996 contributor: fullname: Fujishima – year: 19720500 ident: 3660697 contributor: fullname: Berglund et al. – year: 20000700 ident: 6084264 contributor: fullname: Darwish – year: 19961000 ident: 5567635 contributor: fullname: Acovic et al. – year: 19890400 ident: 4823176 contributor: fullname: Baliga et al. – year: 20030300 ident: 6534825 contributor: fullname: Calafut – year: 19990900 ident: 5959324 contributor: fullname: Kohyama – year: 20030300 ident: 2003/0060013 contributor: fullname: Marchant – year: 20010100 ident: 6174785 contributor: fullname: Parekh et al. – year: 20000500 ident: 6063678 contributor: fullname: D'Anna – year: 20010900 ident: 6291298 contributor: fullname: Williams et al. – year: 20040100 ident: 6677641 contributor: fullname: Kocon – year: 20011200 ident: WO 01/95385 – year: 19990400 ident: 5894157 contributor: fullname: Han et al. – year: 20020800 ident: 6437399 contributor: fullname: Huang – year: 19901100 ident: 4974059 contributor: fullname: Kinzer – year: 19970600 ident: 5640034 contributor: fullname: Malhi – year: 20020800 ident: 2002/0100933 contributor: fullname: Marchant – year: 20020100 ident: 2002/0009832 contributor: fullname: Blanchard – year: 20010300 ident: 6201279 contributor: fullname: Pfirsch – year: 20010300 ident: 6204097 contributor: fullname: Shen et al. – year: 19990500 ident: 5906680 contributor: fullname: Meyerson – year: 19890100 ident: 4801986 contributor: fullname: Chang et al. – year: 19890800 ident: 01-192174 – year: 19910200 ident: 4992390 contributor: fullname: Chang – year: 20020400 ident: 6376314 contributor: fullname: Jerred – year: 20000200 ident: 2000-040822 – year: 20021000 ident: 6472708 contributor: fullname: Hshieh et al. – year: 20020200 ident: 2002/0014658 contributor: fullname: Blanchard – year: 19820600 ident: 4337474 contributor: fullname: Yukimoto – year: 20040400 ident: 6720616 contributor: fullname: Hirler et al. – year: 19911200 ident: 5071782 contributor: fullname: Mori – year: 20001200 ident: 6156611 contributor: fullname: Lan et al. – year: 19990400 ident: 5897360 contributor: fullname: Kawaguchi – year: 19921200 ident: 5168973 contributor: fullname: Asayama et al. – year: 19901100 ident: 4969028 contributor: fullname: Baliga – year: 20010800 ident: 6277706 contributor: fullname: Ishikawa – year: 20020400 ident: 6376878 contributor: fullname: Kocon – year: 19950700 ident: 5436189 contributor: fullname: Beasom – year: 19950800 ident: 5442214 contributor: fullname: Yang – year: 20021100 ident: 6475884 contributor: fullname: Hshieh et al. – year: 20011000 ident: 6307246 contributor: fullname: Nitta et al. – year: 20010200 ident: 6184545 contributor: fullname: Werner et al. – year: 19920700 ident: 5134448 contributor: fullname: Johnsen et al. – year: 20011000 ident: 6309920 contributor: fullname: Laska et al. – year: 20000500 ident: 6064088 contributor: fullname: D'Anna – year: 19980100 ident: 5710072 contributor: fullname: Krautschneider et al. – year: 20011000 ident: 6303969 contributor: fullname: Tan – year: 20031100 ident: 2003/0209757 contributor: fullname: Henninger et al. – year: 19910600 ident: 5023196 contributor: fullname: Johnsen et al. – year: 19961200 ident: 5581100 contributor: fullname: Ajit – year: 20010900 ident: WO 01/71815 – year: 20000800 ident: 6103578 contributor: fullname: Uenishi et al. |
| Score | 2.8452883 |
| Snippet | MOSFET devices for RF applications that use a trench-gate in place of the lateral gate conventionally used in lateral MOSFET devices. A trench-gate provides... |
| SourceID | uspatents |
| SourceType | Open Access Repository |
| Title | Trench-gate LDMOS structures |
| URI | https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8198677 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQSTJPNTQ2N03SBeYjE12TpNQ03UQTi2RdE2DzN9nQMjnFBLLaws_MI9TEK8I0gonBA74XJheYjXQLgG4p1istLijJBy-uBBbvkIjXhRz-DDojMA90-kB5Xk5-YkpASpo-sGYDHc3GzMBsYQBa2uXq5sHNwAk0AthkyyspRqo03AQZ2ALAokIMTKl5IgwyoOWnQLNB41YKPi6-_sEKkMNbS4E9XlEGBTfXEGcPXbhR8elFoCUq8QZQK43FGFiAXfVUCQaFFGDvI80kxTwp2QRYU6daWCRZWhqlJqelWaQBwyPVUJJBEqcxUnjkpBm4gBW1kS74zhwZBhag61JlgZVhSZIc2KcAdZppmA |
| link.rule.ids | 230,309,786,808,891,64396 |
| linkProvider | USPTO |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3PT8IwFH4BNIgniRpQ1B24Vh0Ut52FZSrCEiDhttBfXnQQNuK_79fNEC56bZOvrz9ev77m9StRV3ja7XsDweBHnHGhDVtxXzKO4690A6l4mW0xeYoW_HU5WFYo2r-F-YIbsQ1sye532SZfF8mV2N7LiWel-LPVCEyt-sB3-rleqViZBzCblWar0pHlWLvWR2F0SicAwaEtzbMD2gjP6DguSptU0ek5dWwCKtDtzZUzHr5PZ04p37pDzHtBTjiaP0dsD5V8bG2SSvL422j_kmoI1nWLHIX4w3DlCcnB1dr3RRD0tDTGNxgR7bap_SfM1T91d1SPh2Eyfpm8XVMDrN1jxQc6HarBUH0DZszFbdHpH9OwbJQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Trench-gate+LDMOS+structures&rft.inventor=Wilson%2C+Peter+H&rft.inventor=Sapp%2C+Steven&rft.number=8198677&rft.date=2012-06-12&rft.externalDBID=n%2Fa&rft.externalDocID=08198677 |