Ion implantation through laser fields

Ions are generated and directed toward a workpiece. A laser source generates a laser that is projected above the workpiece in a line. As the laser is generated, a fraction of the ions are blocked by the laser. This may enable selective implantation or modification of the workpiece. In one particular...

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Bibliographic Details
Main Author Ramappa, Deepak A
Format Patent
LanguageEnglish
Published 22.05.2012
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