Ion implantation through laser fields
Ions are generated and directed toward a workpiece. A laser source generates a laser that is projected above the workpiece in a line. As the laser is generated, a fraction of the ions are blocked by the laser. This may enable selective implantation or modification of the workpiece. In one particular...
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Main Author | |
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Format | Patent |
Language | English |
Published |
22.05.2012
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Online Access | Get full text |
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