Wafer prescence detector with end effectors having optical couplers and fibers

• Main Authors: van der Meulen, Peter, Fogel, Paul E
• Format: Patent
• Language: English
• Published: 15.05.2012

The presence of a workpiece on an end effector of a vacuum robotic handler is detecting using any of a number of non-contact techniques in which some or all of the detection hardware is positioned outside a vacuum chamber that encloses the vacuum robotic handler. Various deployments include laser be...