Miniature mechanical resonator device
Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degre...
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Main Author | |
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Format | Patent |
Language | English |
Published |
27.03.2012
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Online Access | Get full text |
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