Miniature mechanical resonator device

Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degre...

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Bibliographic Details
Main Author Hanson, Richard A
Format Patent
LanguageEnglish
Published 27.03.2012
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