Method for loading and unloading a transport device

A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connec...

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Bibliographic Details
Main Authors Struempfel, Johannes, Bauer, Reinhardt, Heisig, Andrewas, Hecht, Hans-Christian, Freitag, Hartmut, Richter, Heiko, Ulbricht, Andre, Schwerdtfeger, Falk
Format Patent
LanguageEnglish
Published 11.10.2011
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