Probe with bi-directional electrostatic actuation
A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positi...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
27.09.2011
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Online Access | Get full text |
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Abstract | A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided. |
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AbstractList | A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided. |
Author | Bonin, Wayne Setiadi, Dadi |
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References | U.S. Appl. No. 12/119,717, filed May 13, 2008; Inventor: Wayne Bonin. Champion (7167434) 20070100 Lutwyche (2006/0023606) 20060200 U.S. Appl. No. 11/933,729, filed Nov. 1, 2007; Inventor: Juli Lee. Baechtold (2006/0187803) 20060800 Milligan (2005/0128927) 20050600 McQuade (5416429) 19950500 Chee (6084420) 20000700 Belov (2007/0121477) 20070500 Chu (2008/0089211) 20080400 Erden (7265937) 20070900 Hilton (7310298) 20071200 Dunklee et al. (7221146) 20070500 |
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Title | Probe with bi-directional electrostatic actuation |
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