Probe with bi-directional electrostatic actuation

A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positi...

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Bibliographic Details
Main Authors Setiadi, Dadi, Bonin, Wayne
Format Patent
LanguageEnglish
Published 27.09.2011
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Abstract A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
AbstractList A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
Author Bonin, Wayne
Setiadi, Dadi
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References U.S. Appl. No. 12/119,717, filed May 13, 2008; Inventor: Wayne Bonin.
Champion (7167434) 20070100
Lutwyche (2006/0023606) 20060200
U.S. Appl. No. 11/933,729, filed Nov. 1, 2007; Inventor: Juli Lee.
Baechtold (2006/0187803) 20060800
Milligan (2005/0128927) 20050600
McQuade (5416429) 19950500
Chee (6084420) 20000700
Belov (2007/0121477) 20070500
Chu (2008/0089211) 20080400
Erden (7265937) 20070900
Hilton (7310298) 20071200
Dunklee et al. (7221146) 20070500
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Title Probe with bi-directional electrostatic actuation
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