Polymer for filling gaps in semiconductor substrate and coating composition using the same
A polymer for filling gaps in a semiconductor substrate and a composition using the polymer are provided. According to the composition, holes having a diameter of 100 nm or less and an aspect ratio (i.e. a ratio between the diameter and height of the holes) of 1 or higher in semiconductor substrates...
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| Main Authors | , , , , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
24.05.2011
|
| Online Access | Get full text |
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