Thermal compensated stampers/imprinters

A method of manufacturing a stamper/imprinter for patterning a recording medium via thermally assisted nano-imprint lithography, comprising steps of: selecting a recording medium for patterning, comprising a substrate with a first coefficient of thermal expasnsion (CTE); providing a first stamper/im...

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Bibliographic Details
Main Authors Gauzner, Gennady (Gene), Wang, Hong Ying
Format Patent
LanguageEnglish
Published 05.04.2011
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