Cleaning apparatus including cleaning tank with improved cover

abababA cleaning apparatus includes a cleaning tank which stores a process liquid used for cleaning a target object (W), a target object holding mechanism which holds the target object (W) in the cleaning tank, and a process liquid supply mechanism which supplies the process liquid to the cleaning t...

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Main Author Eshima, Kazuyoshi
Format Patent
LanguageEnglish
Published 08.03.2011
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Abstract abababA cleaning apparatus includes a cleaning tank which stores a process liquid used for cleaning a target object (W), a target object holding mechanism which holds the target object (W) in the cleaning tank, and a process liquid supply mechanism which supplies the process liquid to the cleaning tank. The target object (W) is immersed in the process liquid in the cleaning tank, and is cleaned while letting the process liquid overflow from the cleaning tank, thereby cleaning the target object (W). The cleaning apparatus further includes a cover which covers a liquid surface in the cleaning tank, a support member which supports the cover, and a follow-up mechanism which moves the cover such that the cover follows the liquid surface while the cover is supported by the support member.
AbstractList abababA cleaning apparatus includes a cleaning tank which stores a process liquid used for cleaning a target object (W), a target object holding mechanism which holds the target object (W) in the cleaning tank, and a process liquid supply mechanism which supplies the process liquid to the cleaning tank. The target object (W) is immersed in the process liquid in the cleaning tank, and is cleaned while letting the process liquid overflow from the cleaning tank, thereby cleaning the target object (W). The cleaning apparatus further includes a cover which covers a liquid surface in the cleaning tank, a support member which supports the cover, and a follow-up mechanism which moves the cover such that the cover follows the liquid surface while the cover is supported by the support member.
Author Eshima, Kazuyoshi
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References (2004-358283) 20041200
Sasayama (5701542) 19971200
(4-97525) 19920300
Kamikawa et al. (2001/0004898) 20010600
(2000-031103) 20000100
(10-289894) 19981000
Official Action Japanese Patent Application No. 2005-192725, mailed on Jun. 15, 2010 w/partial translation.
(2001-338904) 20011200
(6-104234) 19940400
Lei et al. (6050446) 20000400
Muraoka et al. (5826601) 19981000
Gomi (2005/0008360) 20050100
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Title Cleaning apparatus including cleaning tank with improved cover
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