Method and apparatus for the treatment of a semiconductor wafer

Treatment of a semiconductor wafer employs:

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Bibliographic Details
Main Authors Murphy, Brian, Feijóo, Diego, Wahlich, Reinhold
Format Patent
LanguageEnglish
Published 21.09.2010
Online AccessGet full text

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Abstract Treatment of a semiconductor wafer employs:
AbstractList Treatment of a semiconductor wafer employs:
Author Wahlich, Reinhold
Murphy, Brian
Feijóo, Diego
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References (0690484) 19990800
(0798766) 19971000
(0511777) 19921100
English Derwent Abstract AN2000-015536 corresponding to EP 961314 A1.
Yanagisawa et al. (2004/0063329) 20040400
(0488642) 19920600
(09-232279) 19970900
Ian W. Boyd et al., "New large area ultraviolet lamp sources and their applications," Nuclear Instruments and Methods in Physics Research B 121 (1997), pp. 349-356.
(1100117) 20010500
Bauer et al. (2006/0097355) 20060500
Hasei et al. (6224934) 20010500
(0961314) 19991200
(09-008258) 19970100
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