Method for manufacturing thin substrate using a laminate body

• Main Authors: Kessel, Carl R, Boardman, Larry D, Webb, Richard J
• Format: Patent
• Language: English
• Published: 20.07.2010

Provided is a laminated body comprising a substrate to be ground and a support, where the substrate may be ground to a very small (thin) thickness and can then be separated from the support without damaging the substrate. One embodiment is a laminated body comprising a substrate to be ground, a cura...