Ion source and ion implantation apparatus

• Main Authors: Yamashita, Takatoshi, Ikejiri, Tadashi
• Format: Patent
• Language: English
• Published: 13.07.2010

An ion source is to extract a ribbon-shaped ion beam longer in the Y direction in the Z direction and provided with a plasma generating chamber, a plasma electrode which is disposed near the end of the plasma generating chamber in the Z direction and has an ion extracting port extending in the Y dir...