Topcoat compositions and methods of use thereof

A first aspect of the present invention is a topcoat composition, comprising: a copolymer represented by the formula (2): wherein n and m represent respective molar fractions such that n+m=1.

Saved in:
Bibliographic Details
Main Authors Ito, Hiroshi, Sundberg, Linda Karin
Format Patent
LanguageEnglish
Published 01.06.2010
Online AccessGet full text

Cover

Abstract A first aspect of the present invention is a topcoat composition, comprising: a copolymer represented by the formula (2): wherein n and m represent respective molar fractions such that n+m=1.
AbstractList A first aspect of the present invention is a topcoat composition, comprising: a copolymer represented by the formula (2): wherein n and m represent respective molar fractions such that n+m=1.
Author Ito, Hiroshi
Sundberg, Linda Karin
Author_xml – sequence: 1
  givenname: Hiroshi
  surname: Ito
  fullname: Ito, Hiroshi
– sequence: 2
  givenname: Linda Karin
  surname: Sundberg
  fullname: Sundberg, Linda Karin
BookMark eNrjYmDJy89L5WTQD8kvSM5PLFFIzs8tyC_OLMnMzytWSMxLUchNLcnITylWyE9TKC1OVSjJSC1KzU_jYWBNS8wpTuWF0twMCm6uIc4euqXFBYklqXklxfHpRYkgysDc3MjCwMLSmAglAA11Lcs
ContentType Patent
CorporateAuthor International Business Machines Corporation
CorporateAuthor_xml – name: International Business Machines Corporation
DBID EFH
DatabaseName USPTO Issued Patents
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EFH
  name: USPTO Issued Patents
  url: http://www.uspto.gov/patft/index.html
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 07728089
GroupedDBID EFH
ID FETCH-uspatents_grants_077280893
IEDL.DBID EFH
IngestDate Sun Mar 05 22:33:04 EST 2023
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-uspatents_grants_077280893
OpenAccessLink https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7728089
ParticipantIDs uspatents_grants_07728089
PatentNumber 7728089
PublicationCentury 2000
PublicationDate 20100601
PublicationDateYYYYMMDD 2010-06-01
PublicationDate_xml – month: 06
  year: 2010
  text: 20100601
  day: 01
PublicationDecade 2010
PublicationYear 2010
References Nagata et al. (3992208) 19761100
DiPietro et al. (2004/0214102) 20041000
(WO -2004/041762) 20040500
Yamashita et al.; "Synthesis of fluorinated materials for 193 nm immersion lithography and 157 nm lithography". Proceedings of SPIE, vol. 5753, Sturtevant, editor, May 2005, pp. 564-571.
Chandross et al. (5750312) 19980500
Prat et al. (2003/0165769) 20030900
(WO0067072) 20001100
Allen et al. (6806026) 20041000
Petrillo et al.; "Chemically amplified resist processing with top coats for deep-ultraviolet and e-beam applications"; Journal of Vacuum Science & Technology B 16(6) Nov./Dec. 1998; 1998 American Vacuum Society; pp. 3709-3715.
Ito et al. (2006/0292485) 20061200
Hatakeyama et al. (6835524) 20041200
Ito et al. (2002/0102490) 20020800
"hydrophilic defintion" Dictionary.com, copoy right 2009, LLC. 2 pages, downloaded Mar. 24, 2009. http://dictionary.reference.com/browse/hydrophic.
Wang (2003/0022073) 20030100
Journal of Photopolymer Science and Technology, Table of Contents for vol. 17, No. 4 from http://www.jstage.jst.go.jp/browse/photopolymer/17/4/-contents, 5 pages,printed Mar. 24, 2009, with a release date of Mar. 23, 2005.
Garza (5554486) 19960900
Larson et al. (7160665) 20070100
Yoshihara et al. (4792507) 19881200
Hishiro (6875552) 20050400
Yoon et al. (2003/0228537) 20031200
Houlihan et al. (2005/0202347) 20050900
Ito et al. (2002/0146638) 20021000
Yoon et al. (2003/0157430) 20030800
Yoon et al. (6800418) 20041000
Yackel et al. (3402087) 19680900
Yamaguchi et al. (2003/0003393) 20030100
Weast, ed, CRC Handbook of Chemistry and Physics, 52nd Edition (1971-19720, the chemical Rubber company, Cleaveland, Ohio, no month given year published 1971, pp. B-13 and B-14.
French et al. (2005/0286031) 20051200
Pavelchek et al. (5939236) 19990800
Ito et al. (2009/0142714) 20090600
Komoriya et al. (2004/0225159) 20041100
Kawabe et al. (5130224) 19920700
Ito et al.; Fluoropolymer Resists: Fundamentals and Lithographic Evaluation; Journal of Photopolymer Science and Technology; vol. 17, No. 4 (2004); pp. 609-620.
Google, first search page for "hydrophic definition", 2 pages, generated Mar. 24, 2009, at http://www.google.com.
Allen et al. (2006/0188804) 20060800
Ito et al. (2006/0292484) 20061200
Szmanda et al. (2003/0036016) 20030200
Brown (6767587) 20040700
Ito et al. (7473749) 20090100
Sumida et al. (2004/0106755) 20040600
(244567) 19871100
Maeda et al. (7402626) 20080700
Kim et al. (2004/0170919) 20040900
Ito et al. (2009/0136871) 20090500
Wang (6566021) 20030500
References_xml – year: 20050400
  ident: 6875552
  contributor:
    fullname: Hishiro
– year: 20020800
  ident: 2002/0102490
  contributor:
    fullname: Ito et al.
– year: 20051200
  ident: 2005/0286031
  contributor:
    fullname: French et al.
– year: 19680900
  ident: 3402087
  contributor:
    fullname: Yackel et al.
– year: 20030200
  ident: 2003/0036016
  contributor:
    fullname: Szmanda et al.
– year: 20041000
  ident: 2004/0214102
  contributor:
    fullname: DiPietro et al.
– year: 20030100
  ident: 2003/0003393
  contributor:
    fullname: Yamaguchi et al.
– year: 20031200
  ident: 2003/0228537
  contributor:
    fullname: Yoon et al.
– year: 20060800
  ident: 2006/0188804
  contributor:
    fullname: Allen et al.
– year: 20030100
  ident: 2003/0022073
  contributor:
    fullname: Wang
– year: 19871100
  ident: 244567
– year: 19761100
  ident: 3992208
  contributor:
    fullname: Nagata et al.
– year: 20030500
  ident: 6566021
  contributor:
    fullname: Wang
– year: 20050900
  ident: 2005/0202347
  contributor:
    fullname: Houlihan et al.
– year: 20040700
  ident: 6767587
  contributor:
    fullname: Brown
– year: 20041200
  ident: 6835524
  contributor:
    fullname: Hatakeyama et al.
– year: 20041100
  ident: 2004/0225159
  contributor:
    fullname: Komoriya et al.
– year: 20001100
  ident: WO0067072
– year: 19881200
  ident: 4792507
  contributor:
    fullname: Yoshihara et al.
– year: 19980500
  ident: 5750312
  contributor:
    fullname: Chandross et al.
– year: 20090500
  ident: 2009/0136871
  contributor:
    fullname: Ito et al.
– year: 20030800
  ident: 2003/0157430
  contributor:
    fullname: Yoon et al.
– year: 20061200
  ident: 2006/0292485
  contributor:
    fullname: Ito et al.
– year: 19990800
  ident: 5939236
  contributor:
    fullname: Pavelchek et al.
– year: 20041000
  ident: 6800418
  contributor:
    fullname: Yoon et al.
– year: 20080700
  ident: 7402626
  contributor:
    fullname: Maeda et al.
– year: 20021000
  ident: 2002/0146638
  contributor:
    fullname: Ito et al.
– year: 20030900
  ident: 2003/0165769
  contributor:
    fullname: Prat et al.
– year: 19960900
  ident: 5554486
  contributor:
    fullname: Garza
– year: 20090100
  ident: 7473749
  contributor:
    fullname: Ito et al.
– year: 19920700
  ident: 5130224
  contributor:
    fullname: Kawabe et al.
– year: 20040900
  ident: 2004/0170919
  contributor:
    fullname: Kim et al.
– year: 20090600
  ident: 2009/0142714
  contributor:
    fullname: Ito et al.
– year: 20040500
  ident: WO -2004/041762
– year: 20070100
  ident: 7160665
  contributor:
    fullname: Larson et al.
– year: 20061200
  ident: 2006/0292484
  contributor:
    fullname: Ito et al.
– year: 20040600
  ident: 2004/0106755
  contributor:
    fullname: Sumida et al.
– year: 20041000
  ident: 6806026
  contributor:
    fullname: Allen et al.
Score 2.7693198
Snippet A first aspect of the present invention is a topcoat composition, comprising: a copolymer represented by the formula (2): wherein n and m represent respective...
SourceID uspatents
SourceType Open Access Repository
Title Topcoat compositions and methods of use thereof
URI https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7728089
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1NSwMxEB3aImhPior1ixy8xkY3m27PpcsiKD1U6K3k04tuliaLf9_JrhYvek3gMSEkb2byMgNwx5zOJROaaikxQBFWUfkoBeXIFkJya-ddKvv5RVSv_GmTbwZQ7f_CfOAxog3aEu7b0ETfiSvxeu83nvbFn1ONwDpVH_is3700K-Oms9RnqZgPYViwJO1bltUYDhECXbY6hl-kUR7DwaobPYGBrU9huvaN9jKSpOL-kUoRDORJ38U5EO9IGyxJLpn17gxIuVwvKrpH377tkmply76tyM5hhNG7vQDC9UPmNHpZyhTcFEahebJwMyUsdznLJjD5E-byn7krOOofslNC4BpGcdfaG-THqG67xX8Byvxxcw
link.rule.ids 230,309,783,805,888,64374
linkProvider USPTO
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV07T8MwED6VgnhMIEAtTw-spoY4bjpDo_CqMhSpW2Q7NgvEUZOIv885aSsWWG3pdLLle37-DuCGWR1KJjTVUmKCIoyi8l4KytFbCMmNmbSl7LeZSN758yJc9CDZ_IX5wmdES9Slum2qsnYtuBLNe3fxtCN_9hyBhWcf-C4-nczT3I7Gfs5SNNmCbd-K8iz60zg5gD0UgkFbUVe_3EZ8CDtpu3oEPVMcw2juSu1kTTyOew2WIpjKk26Oc0WcJU1liA_KjLMnQOLp_CGhG-nZx9LjVjK20iM4hT7m72YAhOu7wGqMs1Qe8TzKVcRCGdmxEobbkAVDGP4p5uyfvWvYTR_j7PVp9nIO-11X21cHLqBfLxtzic6yVlftOfwAh790bg
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Topcoat+compositions+and+methods+of+use+thereof&rft.inventor=Ito%2C+Hiroshi&rft.inventor=Sundberg%2C+Linda+Karin&rft.number=7728089&rft.date=2010-06-01&rft.externalDBID=n%2Fa&rft.externalDocID=07728089