Method for failure analysis and system for failure analysis

• Main Authors: Tomimatsu, Satoshi, Shichi, Hiroyasu, Fukuda, Muneyuki, Umemura, Kaoru
• Format: Patent
• Language: English
• Published: 25.05.2010

After completion of an arbitrary device process, an apparatus for micro-sample extraction extracts a part of a wafer as a micro-sample of a size equal to or larger than a repetition pattern with a probe and places the extracted micro-sample to a micro-sample storage, and the micro-sample storage is...