Macro inspection apparatus and microscopic inspection method
The invention provides a macro inspection apparatus including: a stage on which an inspection object is placed; a light source that irradiates light on an upper surface of the inspection object from an angular direction arbitrarily selected relative to the upper surface of the inspection object; and...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
18.05.2010
|
| Online Access | Get full text |
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