Capacitor for a semiconductor device and method of forming the same

In a capacitor having a high dielectric constant, the capacitor includes a cylindrical lower electrode, a dielectric layer and an upper electrode. A metal oxide layer is formed on inner, top and outer surfaces of the lower electrode as the dielectric layer. A first sub-electrode is formed on a surfa...

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Bibliographic Details
Main Authors Cho, Young-Joo, Lim, Hyun-Seok, Kim, Rak-Hwan, Kim, Jung-Wook, Lee, Hyun-Suk
Format Patent
LanguageEnglish
Published 18.05.2010
Online AccessGet full text

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