High velocity method for deposing diamond films from a gaseous phase in SHF discharge plasma and device for carrying out said method

−5 The invention relates to carbon deposition by decomposing gaseous compounds with the aid of the SHF discharge plasma and can be used, for example, for producing polycrystalline diamond films (plates), which are used for producing output windows of power SHF sources, for example gyrotrons. Said in...

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Bibliographic Details
Main Authors Vikharev, Anatoly Leontievich, Gorbachev, Aleksey Mikhaylovich, Litvak, Aleksandr Grigorievich, Bykov, Juriy Vladmirovich, Denisov, Grigory Gennadievich, Ivanov, Oleg Andreevich, Koldanov, Vladimir Aleksandrovich
Format Patent
LanguageEnglish
Published 13.04.2010
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