System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers

• Main Authors: Lechuga Gomez, Laura M, Alvarez Sanchez, Mar, Tamayo de Miguel, Francisco Javier
• Format: Patent
• Language: English
• Published: 12.01.2010

The invention relates to a system and method for detecting the displacement, such as the deflection, of a plurality of elements, such as microcantilevers, forming part of an array, by emitting a light beam towards the array and by receiving a reflected light beam on an optical position detector, whe...