Surface treatment system and method thereof

• Main Authors: Cho, Cheon-Soo, Youn, Dong-Sik, Lee, Hyun-Wook, Ha, Samchul, Jun, Hyun-Woo
• Format: Patent
• Language: English
• Published: 11.08.2009

Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applyi...