Surface treatment system and method thereof

Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applyi...

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Main Authors Cho, Cheon-Soo, Youn, Dong-Sik, Lee, Hyun-Wook, Ha, Samchul, Jun, Hyun-Woo
Format Patent
LanguageEnglish
Published 11.08.2009
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Abstract Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applying a power to the object in the deposition chamber, wherein the power applying unit includes a fixed power applying unit installed in the deposition chamber and connected to an external power source; and a movable power applying unit installed at the carrier for being electrically connected to the fixed power applying unit movably as the carrier on which the object of surface treatment is mounted goes into the deposition chamber and thereby applying a power to the object of surface treatment mounted on the carrier by contacting thereto.
AbstractList Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applying a power to the object in the deposition chamber, wherein the power applying unit includes a fixed power applying unit installed in the deposition chamber and connected to an external power source; and a movable power applying unit installed at the carrier for being electrically connected to the fixed power applying unit movably as the carrier on which the object of surface treatment is mounted goes into the deposition chamber and thereby applying a power to the object of surface treatment mounted on the carrier by contacting thereto.
Author Ha, Samchul
Cho, Cheon-Soo
Youn, Dong-Sik
Lee, Hyun-Wook
Jun, Hyun-Woo
Author_xml – sequence: 1
  givenname: Cheon-Soo
  surname: Cho
  fullname: Cho, Cheon-Soo
– sequence: 2
  givenname: Dong-Sik
  surname: Youn
  fullname: Youn, Dong-Sik
– sequence: 3
  givenname: Hyun-Wook
  surname: Lee
  fullname: Lee, Hyun-Wook
– sequence: 4
  givenname: Samchul
  surname: Ha
  fullname: Ha, Samchul
– sequence: 5
  givenname: Hyun-Woo
  surname: Jun
  fullname: Jun, Hyun-Woo
BookMark eNrjYmDJy89L5WTQDi4tSktMTlUoKUpNLMlNzStRKK4sLknNVUjMS1HITS3JyE9RKMlILUrNT-NhYE1LzClO5YXS3AwKbq4hzh66pcUFiSVArcXx6UWJIMrA3NTcyNjY0pgIJQA-MyxJ
ContentType Patent
CorporateAuthor LG Electronics Inc
CorporateAuthor_xml – name: LG Electronics Inc
DBID EFH
DatabaseName USPTO Issued Patents
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EFH
  name: USPTO Issued Patents
  url: http://www.uspto.gov/patft/index.html
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 07572339
GroupedDBID EFH
ID FETCH-uspatents_grants_075723393
IEDL.DBID EFH
IngestDate Sun Mar 05 22:31:01 EST 2023
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-uspatents_grants_075723393
OpenAccessLink https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7572339
ParticipantIDs uspatents_grants_07572339
PatentNumber 7572339
PublicationCentury 2000
PublicationDate 20090811
PublicationDateYYYYMMDD 2009-08-11
PublicationDate_xml – month: 08
  year: 2009
  text: 20090811
  day: 11
PublicationDecade 2000
PublicationYear 2009
References (WO-99/27157) 19990600
Yamazaki et al. (5079031) 19920100
Okamoto (6017396) 20000100
Latz (5244559) 19930900
Bergman et al. (4556471) 19851200
Suzuki et al. (4501766) 19850200
Yamamoto et al. (5372648) 19941200
References_xml – year: 19990600
  ident: WO-99/27157
– year: 20000100
  ident: 6017396
  contributor:
    fullname: Okamoto
– year: 19851200
  ident: 4556471
  contributor:
    fullname: Bergman et al.
– year: 19930900
  ident: 5244559
  contributor:
    fullname: Latz
– year: 19850200
  ident: 4501766
  contributor:
    fullname: Suzuki et al.
– year: 19920100
  ident: 5079031
  contributor:
    fullname: Yamazaki et al.
– year: 19941200
  ident: 5372648
  contributor:
    fullname: Yamamoto et al.
Score 2.74948
Snippet Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a...
SourceID uspatents
SourceType Open Access Repository
Title Surface treatment system and method thereof
URI https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7572339
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3PS8MwFH5sQ1BPiorzFzl4jSZN1jTnsVIEZQeF3Ua6JF60HW2H__5eGile3DWBxwvh5fse-fIF4FFYkRitNtRwn1JZWks1IglV2hotMXXZqypf39LiQ76sZqsRFMNbmG8sI7rFXNqnXbvt6l5cicd73HgazZ-DR2AV3Ad-qq_a2KX1z2qmEiH0GMYZC9KuRV6cwjGGQMpWde0f0MjP4GjZj57DyFUXgDXaeLNxZNB2k2ijTLCZJ_EnZxLomKv9JZB88T4v6BB5_dkExcqa_WYgrmCCnbu7BpIp77mzmsmSS25Z5pB8ZIlHhEhTx8QUpv-GuTkwdwsn8VIDG0B-B5Ou2bl7xMaufOgXvgdrom8m
link.rule.ids 230,309,786,808,891,64394
linkProvider USPTO
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1NT8QgEJ2sq_HjpFHj-snBK1oKW8pZt6lfmx402VvTLuBF203bjX_foZjGi14hmUwgw3sTHg-Aa655WCi5pAWzERWl1lQhklCpdKEEpi56VeXLPErfxONiuhhBOryF-cQyoivMpb1Zt6uu7sWVeLz7jafe_Nl5BFbOfeCr-qgLnWl7K6cy5FxtwKbDWOeiP0vSPdjBIEjaqq79BRvJPmxl_egBjEx1CFiljS2WhgzqbuKNlAm288T_5UwcITO1PQKSzF7vUjpEzt8bp1nJg58c-DGMsXc3J0BiaS0zWgWiZILpIDZIP-LQIkZEkQn4BCZ_hjn9Z-4KtrP7JH9-mD-dwa6_4cBukJ3DuGvW5gKBsisv-zX4BgvQciA
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Surface+treatment+system+and+method+thereof&rft.inventor=Cho%2C+Cheon-Soo&rft.inventor=Youn%2C+Dong-Sik&rft.inventor=Lee%2C+Hyun-Wook&rft.inventor=Ha%2C+Samchul&rft.inventor=Jun%2C+Hyun-Woo&rft.number=7572339&rft.date=2009-08-11&rft.externalDBID=n%2Fa&rft.externalDocID=07572339