Surface treatment system and method thereof

Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applyi...

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Bibliographic Details
Main Authors Cho, Cheon-Soo, Youn, Dong-Sik, Lee, Hyun-Wook, Ha, Samchul, Jun, Hyun-Woo
Format Patent
LanguageEnglish
Published 11.08.2009
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Summary:Disclosed are a surface treatment system that includes a deposition chamber for forming a deposition layer at a surface of an object of surface treatment; a carrier for carrying the object of surface treatment by mounting thereon, and a power applying unit for forming a deposition reaction by applying a power to the object in the deposition chamber, wherein the power applying unit includes a fixed power applying unit installed in the deposition chamber and connected to an external power source; and a movable power applying unit installed at the carrier for being electrically connected to the fixed power applying unit movably as the carrier on which the object of surface treatment is mounted goes into the deposition chamber and thereby applying a power to the object of surface treatment mounted on the carrier by contacting thereto.