Optical scanning system for surface inspection

In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from...

Full description

Saved in:
Bibliographic Details
Main Authors Leslie, Brian C, Nikoonahad, Mehrdad, Wells, Keith B
Format Patent
LanguageEnglish
Published 13.01.2009
Online AccessGet full text

Cover

Abstract In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.
AbstractList In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.
Author Wells, Keith B
Leslie, Brian C
Nikoonahad, Mehrdad
Author_xml – sequence: 1
  givenname: Brian C
  surname: Leslie
  fullname: Leslie, Brian C
– sequence: 2
  givenname: Mehrdad
  surname: Nikoonahad
  fullname: Nikoonahad, Mehrdad
– sequence: 3
  givenname: Keith B
  surname: Wells
  fullname: Wells, Keith B
BookMark eNrjYmDJy89L5WTQ8y8oyUxOzFEoTk7My8vMS1coriwuSc1VSMsvUiguLUpLTE5VyMwrLkhNLsnMz-NhYE1LzClO5YXS3AwKbq4hzh66pcUFiSWpeSXF8elFiSDKwNzE3NzY3MiYCCUA52ItmQ
ContentType Patent
CorporateAuthor KLA-Tencor Technologies Corporation
CorporateAuthor_xml – name: KLA-Tencor Technologies Corporation
DBID EFH
DatabaseName USPTO Issued Patents
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EFH
  name: USPTO Issued Patents
  url: http://www.uspto.gov/patft/index.html
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 07477372
GroupedDBID EFH
ID FETCH-uspatents_grants_074773723
IEDL.DBID EFH
IngestDate Sun Mar 05 22:34:31 EST 2023
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-uspatents_grants_074773723
OpenAccessLink https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7477372
ParticipantIDs uspatents_grants_07477372
PatentNumber 7477372
PublicationCentury 2000
PublicationDate 20090113
PublicationDateYYYYMMDD 2009-01-13
PublicationDate_xml – month: 01
  year: 2009
  text: 20090113
  day: 13
PublicationDecade 2000
PublicationYear 2009
References Heebner et al. (4441124) 19840400
Koenig (4752898) 19880600
"Bulk Scatter Measurements in Fused Silica at Two Wavelengths: A Comparison with Rayleigh Scatter Theory," J. P. Black et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 273-284.
"Windowing Effects on Light Scattering By Sinusoidal Surfaces," E. Marx et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 2-14.
"Inspection of Patterned Wafers: 0.35 βm Design Rules and Beyond," J.R. Dralla, presented at Semicon Kansai, Jun. 15-17, 1994, pp. 1-8.
(3-225939) 19911000
"The Wavelength Dependence of Scatter From O-50 Grade Beryllium Mirrors, " C.M. Egert et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 57-65.
Roulet (4556290) 19851200
Drake (5742422) 19980400
"New Laser Scanning Techniques for Wafter Inspection," M. Nikoonahad, SPIE, vol. 2638, Feb. 1995, pp. 285-301.
Nikoonahad et al. (5576831) 19961100
Morioka et al. (5274434) 19931200
Bevis et al. (5241366) 19930800
Z. Wang et al., "Compact all-pass filters in photonic crystals as the building block for high capacity optical delay lines," The American Physical Society, Physical Review E 68, 066616 (2003), 4 pages.
M. Vaez-Iravani et al, "SPI+ Concept: Measurements, Analyses, and Recommendations", Revision 2, Oct. 1996, KLA-Tencor Corporation, 65 pages.
Knollenberg (4728190) 19880300
Mizutani et al. (4748333) 19880500
Sawatzki (5092557) 19920300
Worster et al. (5479252) 19951200
(2-87047) 19900300
"Response of a Wafer Surface Scanner to Non-Ideal, Real World Particles," S. Chae et al., Particle Technology Laboratory Publication No. 820, Jan. 1992, 10 pages.
Notification of Transmittal of International Preliminary Examination Report, in corresponding PCT/US97/09650, dated Mar. 5, 1998, 4 pages.
(04-122042) 19920400
Ido et al. (4589773) 19860500
Neukermans et al. (5076692) 19911200
S. Stokowski et al., "Wafer Inspection Technology Challenges for ULSI Manufacturing", KLA-Tencor Corporate Magazine, Spring 1999, 11 pages.
Nikoonahad et al. (6215551) 20010400
Vander Neut (4306808) 19811200
Grobman et al. (4405238) 19830900
"A WIS, 300mm Advanced Wafer Inspection System", Apr. 6, 1006, ADE Optical Systems.
(61-104658) 19860500
J. Ryuta et al., "Crystal-Originated Singularities on SI Wafer Surface after SCI Cleaning," 1990, 3 pages.
Alumot et al. (6178257) 20010100
Fossey et al. (6118525) 20000900
"Experimental Scattering Investigations and Radiative Transfer Calculations of Large Arbitrarily Shaped Absorbing Particles," C. Sasse, SPIE Optical Scattering, vol. 1995, 1993, pp. 294-299.
Danko (5805278) 19980900
Stonestrom et al. (4898471) 19900200
Adachi et al. (5888710) 19990300
"A Step-Height Standard for Surface Profiler Calibration," P. Z. Takacs et al. SPIE Optical Scattering, vol. 1995, 1993, pp. 235-244.
Andresen et al. (4240442) 19801200
(62-274633) 19871100
Almogy (6122046) 20000900
R. S. Howland, "Detecting Killer Particles on Rough Surfaces", Semiconductor International, Jul. 1994, 6 pgs.
Saadat et al. (4766324) 19880800
"Acoustooptic Deflection Materials and Techniques," Uchida et al., Proceedings for the IEEE, vol. 61, No. 8, Aug. 1973, pp. 1073-1092.
"All About Bragg Angle Errors in Acousto-optic Modulators and Deflectors," ISOMET, May 1993, pp. 1-23.
(53-32946) 19931200
"A Stand-Alone Scanning Force and Friction Microscope," M. Hipp et al. Ultramicroscopy, 42-44, 1992, pp. 1498-1503.
Chadwick et al. (5085517) 19920200
Galbraith (4601576) 19860700
Maldari et al. (4895446) 19900100
Suzuki et al. (5767962) 19980600
Stokowski et al. (4998019) 19910300
"Design Considerations for Acousto-optic Devices," Young Jr. et al., Proceedings of IEEE, vol. 69, Jan. 1981, pp. 54-64.
Pecen et al. (5083035) 19920100
"Design Review of an Instrument to Map Low Level Hydrocarbon Contamination," B. D. Swimley et al. SPIE Optical Scattering, vol. 1995, 1993, pp. 92-100.
Nikoonahad et al. (5883710) 19990300
"Measurement of Hemispherical Directional Reflectance in the Infrared," J. T. Neu, SPIE Optical Scattering, vol. 1995, 1993, pp. 101-120.
"Design Review of a High Accuracy UV to Near IR Scatterometer," T. F. Schiff et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 121-130.
Kelderman et al. (4844617) 19890700
Kakinoki et al. (5004929) 19910400
"Wavelength Scaling Investigation of Several Materials," J.C. Stover et al. SPIE Optical Scattering, vol. 1995, 1993, pp. 256-266.
Okada et al. (5125741) 19920600
J. Ryuta et al, "Effect of Crystal Pulling Rate on Formation of Crystal-Originated 'Particles' on SI Wafers", Mitsubishi Corporation, Jpn. J. Appl. Phys. Mar. 31, 1993.
Yatsugake et al. (5903342) 19990500
Porter et al. (4912487) 19900300
Ikari et al. (4864147) 19890900
"Accoustoopic Scanners and Modulators," Gottleib, M. Optical Scanning, ed. By G.F. Marshall, Dekker 1991, pp. 615-685.
Galbraith (5168386) 19921200
Koizumi et al. (4614427) 19860900
Hayano et al. (4999510) 19910300
"Diffuse Relection From Smooth Dielectric Surfaces," L. Wolff, SPIE Optical Scattering, vol. 1995, 1993, pp. 26-44.
Walker et al. (4786815) 19881100
"BRDF Round Robin Test of ASTM E1392," T.A. Leonard et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 285-293.
S. Stokowski et al., "Wafer Inspection Technology Challenges for ULSI Manufacturing", Part II, KLA-Tenor Corporate Magazine, Autumn 1999, pp. 15-19.
Japanese Patent Office, "Office Action," mailed in related Japanese Application No. H10(1998)-500825 on Jan. 9, 2007, 6 pages.
Alford et al. (4376583) 19830300
Vaught et al. (5264912) 19931100
Fossey et al. (6292259) 20010900
Kajimura (5166516) 19921100
"Meeting the Challenges of Unpatterned Wafer Inspection for 130nm Device Geometries," H. Altendorfer et al., Silicon Wafer Symposium, SEMI 1998, pp. K-1-K-8.
Fossey, Michael E.; Hunt, Jim; Clementi, Lee, "Engineering Requirements Document, Galaxy, Advanced Wafer Inspection Station", Draft Revision 0.1, Jun. 13, 1995, ADE Optical Systems.
"Characterization of Curved Plastic Surfaces," Q. Y. Xie et al. SPIE Optical Scattering, vol. 1995, 1993, pp. 193-201.
"Reflection, Scattering, and Polarization From a Very Rough Black Surface," S.F. Nee et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 202-212.
Steigmeier et al. (4526468) 19850700
Hayano et al. (4889998) 19891200
"Measurement of Hemispherical Directional Reflectance in the Infared." J.T. Neu, SPIE, Optical Scanning vol. 1995, 1993.
Fossey et al. (6509965) 20030100
"Sources of Errors in Spectroscopic, Low Level Integrated Light Scattering Measurements, " D. Rönnow, SPIE Optical Scattering, vol. 1995, 1993, pp. 143-151.
Fossey, Michael E., "Calibration, Signal & Data Processing for Galaxy AWIS Beta Units", Sep. 26, 1996, ADE Optical Systems.
"COPs/Particles Discrimination with a Surface Scanning Inspection System," M. Akbulut et al., Semiconductor International, Apr. 1999, pp. 1-6.
Batchelder (4740708) 19880400
Drake (5667353) 19970900
Leslie et al. (6888627) 20050500
Steigmeier et al. (4598997) 19860700
Alumot et al. (5699447) 19971200
Nakagawa et al. (5517027) 19960500
Akamatsu et al. (5162642) 19921100
Manns et al. (5027132) 19910600
"Imaging Systems: Detectors of the Past, Present, and Future," S. McGeorge, Spectroscopy, vo. 2, No. 4, 1987.
(62-153737) 19870700
Minami et al. (4230940) 19801000
"Comparison of Measured and Modeled Scatter from Defects and Particles on Silicon Wafers," J.C. Stover et al., Electromagnetic and Light Scattering: Theory and Applications, Workshop 1997, pp. 109-118.
"Scattering Properties of Very Rough Surfaces: Applications to Brightness Measurement of Common Objects," P. Sandoz et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 223-234.
"Dynamic Performance of a Scanning X-Y Stage for Automated Electron-beam Inspection," D. J. Clark et al., J. Vac. Sci. Technol. B. vol. 10, No. 6, Nov./Dec. 1992, pp. 2638-2642.
Notification of Transmittal of the International Search Report or the Declaration, in corresponding PCT/US97/09650, dated Aug. 29, 1997, 5 pages.
(3-128445) 19910500
Fujino et al. (5715052) 19980200
Malin et al. (5133635) 19920700
(3-148049) 19910600
"Very High Angular Selectivity System for Measuring Backscatter from Rough Surfaces." Y. Takakura et al. SPIE Optical Scattering, vol. 1995, 1993, pp. 213-222.
(62-174655) 19940600
Avni et al. (4966455) 19901000
"Optical Considerations for an Acoustooptic Deflector," Dickson, Applied Optics, vol. II, No. 10, Oct. 1972, pp. 2196-2202.
"Acousto-optical Deflectors," Bademian, ISOMET, May 1993, pp. 1-32.
"Acoustooptic Devices and Applications," Chang, IEEE Transactions on Sonics and Ultrasonics , vol. Su-23, No. 1, Jan. 1976, pp. 1-22.
Galbraith (4378159) 19830300
Eveleth (3851951) 19741200
Cushing et al. (4277178) 19810700
Adams (4899055) 19900200
(0 398 781) 19901100
"Scatterometers Improve Laser Mirrors," G. Valliant, TMA Technologies, Inc. Photonics Spectra, vol. 25, Issue 8, Aug. 1991, p. 100.
Nikoonahad et al. (5633747) 19970500
"High Speed Laser Facsimile Scanner," Grossman et al., SPIE, Laser Recording and Information Handling, vol. 200, 1979, pp. 8-15.
Leslie et al. (6081325) 20000600
"Plane-wave Expansions Methods Applied to the Calculation of the Optical Scattering by One-dimensional Randomly Rough Dielectric Surfaces," S, Mainguy, SPIE Optical Scattering, vol. 1995, 1993, pp. 45-56.
"Preparing Samples for Scattering Measurements-A Cleaning Study: Part 2," J. Brown, SPIE Optical Scattering, vol. 1995, 1993, pp. 80-91.
Shiba et al. (RE33991) 19920700
Tokura (5272517) 19931200
Leslie et al. (7075637) 20060700
"Dual Sensor Technology for High-Speed Detection of 0.1 Micron Defects." Alumot, D. et al., SPIE, vol. 1926, Integrated Circuit Metrology, Inspection and Process Control VII, 1193, pp. 1-12.
"Microtopography Investigations of Optical Surfaces and Thin Films by Light Scattering, Optical Profilometry, and Atomic Force Microscopy," A. Duparré´et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 181-192.
Hagiwara et al. (5149982) 19920900
Allemand (5317380) 19940500
Nikoonahad et al. (5530550) 19960600
(065051) 19811200
"A Light Scattering and Distribution Model for Scintillation Cameras," S. Rioux et al., SPIE Optical Scattering, vol. 1995, 1993, pp. 15-25.
(62-128135)
References_xml – year: 19881100
  ident: 4786815
  contributor:
    fullname: Walker et al.
– year: 19881100
  ident: 63-284455
– year: 19921000
  ident: 5153445
  contributor:
    fullname: Stapleton
– year: 19920900
  ident: 5149982
  contributor:
    fullname: Hagiwara et al.
– year: 19830700
  ident: 4391524
  contributor:
    fullname: Steigmeier et al.
– year: 19960500
  ident: 5517027
  contributor:
    fullname: Nakagawa et al.
– year: 20030100
  ident: 6509965
  contributor:
    fullname: Fossey et al.
– year: 20010900
  ident: 6292259
  contributor:
    fullname: Fossey et al.
– year: 19890900
  ident: 4864147
  contributor:
    fullname: Ikari et al.
– year: 19880900
  ident: 4772126
  contributor:
    fullname: Allemand et al.
– year: 19830300
  ident: 4376583
  contributor:
    fullname: Alford et al.
– year: 19980200
  ident: 5715052
  contributor:
    fullname: Fujino et al.
– year: 19811200
  ident: 065051
– year: 19890100
  ident: 4800268
  contributor:
    fullname: Miyoshi et al.
– year: 20050500
  ident: 6888627
  contributor:
    fullname: Leslie et al.
– year: 19931200
  ident: 5272517
  contributor:
    fullname: Tokura
– year: 19920700
  ident: 5133635
  contributor:
    fullname: Malin et al.
– year: 19940600
  ident: 62-174655
– year: 19920300
  ident: 5092557
  contributor:
    fullname: Sawatzki
– year: 19890700
  ident: 4844617
  contributor:
    fullname: Kelderman et al.
– year: 20000900
  ident: 6118525
  contributor:
    fullname: Fossey et al.
– year: 19870600
  ident: 62-128135
– year: 19880600
  ident: 4752898
  contributor:
    fullname: Koenig
– year: 19950700
  ident: 5436464
  contributor:
    fullname: Hayano et al.
– year: 19901000
  ident: 4966455
  contributor:
    fullname: Avni et al.
– year: 19851200
  ident: 4556290
  contributor:
    fullname: Roulet
– year: 19930200
  ident: 5189481
  contributor:
    fullname: Jann et al.
– year: 19900200
  ident: 4898471
  contributor:
    fullname: Stonestrom et al.
– year: 20000600
  ident: 6081325
  contributor:
    fullname: Leslie et al.
– year: 19890900
  ident: 4864123
  contributor:
    fullname: Mizutani et al.
– year: 19900300
  ident: 2-87047
– year: 19990300
  ident: 5883710
  contributor:
    fullname: Nikoonahad et al.
– year: 19900100
  ident: 4895446
  contributor:
    fullname: Maldari et al.
– year: 19971200
  ident: 5699447
  contributor:
    fullname: Alumot et al.
– year: 19931100
  ident: 5264912
  contributor:
    fullname: Vaught et al.
– year: 19741200
  ident: 3851951
  contributor:
    fullname: Eveleth
– year: 19911000
  ident: 3-225939
– year: 19801000
  ident: 4230940
  contributor:
    fullname: Minami et al.
– year: 19911200
  ident: 5076692
  contributor:
    fullname: Neukermans et al.
– year: 19910500
  ident: 3-128445
– year: 19881200
  ident: 4794264
  contributor:
    fullname: Quackenbos et al.
– year: 19870700
  ident: 62-153737
– year: 19860900
  ident: 4614427
  contributor:
    fullname: Koizumi et al.
– year: 19870600
  ident: 4676637
  contributor:
    fullname: Uto et al.
– year: 19870300
  ident: 4650983
  contributor:
    fullname: Suwa
– year: 19921100
  ident: 5162642
  contributor:
    fullname: Akamatsu et al.
– year: 19801200
  ident: 4240442
  contributor:
    fullname: Andresen et al.
– year: 19900600
  ident: 4936676
  contributor:
    fullname: Stauffer
– year: 19910600
  ident: 5027132
  contributor:
    fullname: Manns et al.
– year: 19880500
  ident: 4748333
  contributor:
    fullname: Mizutani et al.
– year: 19880800
  ident: 4766324
  contributor:
    fullname: Saadat et al.
– year: 19970900
  ident: 5667353
  contributor:
    fullname: Drake
– year: 19920600
  ident: 5125741
  contributor:
    fullname: Okada et al.
– year: 19921200
  ident: 5168386
  contributor:
    fullname: Galbraith
– year: 19880400
  ident: 4740708
  contributor:
    fullname: Batchelder
– year: 19860700
  ident: 4598997
  contributor:
    fullname: Steigmeier et al.
– year: 19891200
  ident: 4889998
  contributor:
    fullname: Hayano et al.
– year: 19940500
  ident: 5317380
  contributor:
    fullname: Allemand
– year: 20000900
  ident: 6122046
  contributor:
    fullname: Almogy
– year: 19850700
  ident: 4526468
  contributor:
    fullname: Steigmeier et al.
– year: 19811200
  ident: 4306808
  contributor:
    fullname: Vander Neut
– year: 19951000
  ident: 5461474
  contributor:
    fullname: Yoshii et al.
– year: 19980400
  ident: 5742422
  contributor:
    fullname: Drake
– year: 19961100
  ident: 5576831
  contributor:
    fullname: Nikoonahad et al.
– year: 19980600
  ident: 5767962
  contributor:
    fullname: Suzuki et al.
– year: 19880400
  ident: 63-73635
– year: 19921100
  ident: 5166516
  contributor:
    fullname: Kajimura
– year: 19980100
  ident: 5712701
  contributor:
    fullname: Clementi et al.
– year: 20010100
  ident: 6178257
  contributor:
    fullname: Alumot et al.
– year: 19830300
  ident: 4378159
  contributor:
    fullname: Galbraith
– year: 19910600
  ident: 3-148049
– year: 19910300
  ident: 4999510
  contributor:
    fullname: Hayano et al.
– year: 19930800
  ident: 5241366
  contributor:
    fullname: Bevis et al.
– year: 19990300
  ident: 5888710
  contributor:
    fullname: Adachi et al.
– year: 19871100
  ident: 62-274633
– year: 19970500
  ident: 5633747
  contributor:
    fullname: Nikoonahad et al.
– year: 19840400
  ident: 4441124
  contributor:
    fullname: Heebner et al.
– year: 19901100
  ident: 0 398 781
– year: 19960600
  ident: WO 96/18093
– year: 19820200
  ident: 4314763
  contributor:
    fullname: Steigmeier et al.
– year: 19941100
  ident: 5363187
  contributor:
    fullname: Hagiwara et al.
– year: 19980900
  ident: 5805278
  contributor:
    fullname: Danko
– year: 19881200
  ident: 63-304179
– year: 19900300
  ident: 2-78936
– year: 19931200
  ident: 5274434
  contributor:
    fullname: Morioka et al.
– year: 19900200
  ident: 4899055
  contributor:
    fullname: Adams
– year: 19860700
  ident: 4601576
  contributor:
    fullname: Galbraith
– year: 19920200
  ident: 5085517
  contributor:
    fullname: Chadwick et al.
– year: 19960600
  ident: 5530550
  contributor:
    fullname: Nikoonahad et al.
– year: 19810700
  ident: 4277178
  contributor:
    fullname: Cushing et al.
– year: 19940200
  ident: 6-34559
– year: 19830900
  ident: 4405238
  contributor:
    fullname: Grobman et al.
– year: 19910400
  ident: 5004929
  contributor:
    fullname: Kakinoki et al.
– year: 19800800
  ident: 55-112502
– year: 19900300
  ident: 4912487
  contributor:
    fullname: Porter et al.
– year: 19990500
  ident: 5903342
  contributor:
    fullname: Yatsugake et al.
– year: 19920100
  ident: 5083035
  contributor:
    fullname: Pecen et al.
– year: 19860500
  ident: 4589773
  contributor:
    fullname: Ido et al.
– year: 19931200
  ident: 53-32946
– year: 19970800
  ident: 5659390
  contributor:
    fullname: Danko
– year: 19860500
  ident: 61-104658
– year: 20060700
  ident: 7075637
  contributor:
    fullname: Leslie et al.
– year: 19880300
  ident: 4728190
  contributor:
    fullname: Knollenberg
– year: 19910300
  ident: 4998019
  contributor:
    fullname: Stokowski et al.
– year: 20010400
  ident: 6215551
  contributor:
    fullname: Nikoonahad et al.
– year: 19920400
  ident: 04-122042
– year: 19920600
  ident: 5122898
  contributor:
    fullname: Picault
– year: 19951200
  ident: 5479252
  contributor:
    fullname: Worster et al.
– year: 19901000
  ident: 4966457
  contributor:
    fullname: Hayano et al.
– year: 19870300
  ident: 4650333
  contributor:
    fullname: Crabb et al.
– year: 19920700
  ident: RE33991
  contributor:
    fullname: Shiba et al.
Score 2.7251012
Snippet In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface...
SourceID uspatents
SourceType Open Access Repository
Title Optical scanning system for surface inspection
URI https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7477372
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8QwEB52F0H3pKi4vsjBa9atTVJ7XrYUQd2Dwt6WvCqCpqVp8e87TWTxotcEhgkhM99kZr4BuGHSJlogcuPcKMqY1BRBPadcZLlUwt5lIRXz-CTKV_aw4ZsRlLtemE98RrRBXfy8901Xh-JKNO_x4mkkfx44At3APvDlPmpp1qa6RVg8TFwZw_h-MZT2rYpyCvsoAiGb6_wvp1Ecwt46rB7ByLpjmD834d-YeB3nBJHIokwQNhLft5XUlry72PpYuxMgxeplWdKd8O1bOxStbBc_SqSnMMHg3Z4BsZXhNhe5xjiDGSEUWgiVCm2NtCrT-Qxmf4o5_2fvAg5iXiOhSXoJk67t7RW6x05dh7N_A6vmcQ0
link.rule.ids 230,309,783,805,888,64367
linkProvider USPTO
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8QwEB7WVXycFBV3feXgNau1TUrPq6W-1h4U9lbyqgialj7w7ztNZPGi1wSGISEz32RmvgG4iIQJFEfkxpiWNIqEogjqGWU8ToTk5jp2qZinBc9eo_slW44gW_XCfOIzojXq0s76tu4qV1yJ5t1fPPXkzwNHoB3YB77sRyV0rstLhMXDxJU1WEcfy11IlmY7sIVCELTZrv3lNtJd2Mjd6h6MjN2H2XPtfo5Jq_ykIOJ5lAkCR9L2TSmUIe_WNz9W9gBIevsyz-hKePHWDGUrxdWPGuEhjDF8N0dATKmZSXiiMNKINOcSbYQMuTJaGBmrZAKTP8VM_9k7h838Ji0e7xYPx7DtkxwBDcITGHdNb07RV3byzB3DN2R_dAo
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Optical+scanning+system+for+surface+inspection&rft.inventor=Leslie%2C+Brian+C&rft.inventor=Nikoonahad%2C+Mehrdad&rft.inventor=Wells%2C+Keith+B&rft.number=7477372&rft.date=2009-01-13&rft.externalDBID=n%2Fa&rft.externalDocID=07477372