Semiconductor integrated circuit devices having single crystalline thin film transistors and methods of fabricating the same

Semiconductor integrated circuit devices having single crystalline thin film transistors and methods of fabricating the same are provided. The semiconductor integrated circuit devices include an interlayer insulating layer formed on a semiconductor substrate and a single crystalline semiconductor pl...

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Bibliographic Details
Main Authors Kim, Sung-Jin, Jung, Soon-Moon, Cho, Won-Seok, Jang, Jae-Hoon, Kim, Jong-Hyuk, Kwak, Kun-Ho, Lim, Hoon
Format Patent
LanguageEnglish
Published 26.08.2008
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