Method for correcting disturbances in a level sensor light path
The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more refe...
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Format | Patent |
Language | English |
Published |
12.08.2008
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Abstract | The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. The level sensor has an optical arrangement in a predetermined area close to where the substrate is to be located. The measurement beam and the reference beam propagate along substantially equal optical paths of propagation in the predetermined area. The optical arrangement deviates the reference beam from the substantially equal optical paths of propagation in the predetermined area such that the at least one reference beam does not hit the substrate. |
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AbstractList | The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. The level sensor has an optical arrangement in a predetermined area close to where the substrate is to be located. The measurement beam and the reference beam propagate along substantially equal optical paths of propagation in the predetermined area. The optical arrangement deviates the reference beam from the substantially equal optical paths of propagation in the predetermined area such that the at least one reference beam does not hit the substrate. |
Author | Ouwehand, Luberthus Blokland, Huibert Van Loenhout, Elke Balan, Oana Cristina Van Asten, Nicolaas Antonius Allegondus Johannes Bakker, Hans Baltus Van Well, Alexander Charles Franciscus Anna Cheng, Lun Kai Viguurs, Machiel Jacobus Johannes |
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References | (2000-81320) 20000300 Ogawa et al. (6501553) 20021200 Chen (2005/0037288) 20050200 (0 502 583) 19980600 Grek et al. (6507405) 20030100 Morikawa (2005/0046885) 20050300 Mueller et al. (2005/0078320) 20050400 Jasper et al. (2004/0080737) 20040400 Van Asten et al. (2007/0013915) 20070100 Krijnen (2005/0179909) 20050800 Schuster (2004/0000627) 20040100 Colonna De Lega et al. (2005/0057757) 20050300 De Groot et al. (2005/0068540) 20050300 Mueller et al. (6806966) 20041000 |
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Snippet | The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the... |
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Title | Method for correcting disturbances in a level sensor light path |
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