Method and system for improved performance of manufacturing processes

A system and method including identifying a stopped range, identifying at least one lot of WIP associated with the stopped range, and processing the at least one lot in at least one operation within the stopped range at a lower priority relative to other lots. The system and method may be implemente...

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Main Authors Burda, Richard G, Joshi, Aseem K, Shikalgar, Sameer T, van Oss, Susan Kangas, Varekamp, Patrick R
Format Patent
LanguageEnglish
Published 24.06.2008
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Abstract A system and method including identifying a stopped range, identifying at least one lot of WIP associated with the stopped range, and processing the at least one lot in at least one operation within the stopped range at a lower priority relative to other lots. The system and method may be implemented as part of a range management system.
AbstractList A system and method including identifying a stopped range, identifying at least one lot of WIP associated with the stopped range, and processing the at least one lot in at least one operation within the stopped range at a lower priority relative to other lots. The system and method may be implemented as part of a range management system.
Author Varekamp, Patrick R
Shikalgar, Sameer T
Joshi, Aseem K
van Oss, Susan Kangas
Burda, Richard G
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References Stephen J. Shea, et al, "Development and Implementation the Range Management System in a Multi-Flow Fabricator", 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, p. 398-404.
Martin (6259959) 20010700
Weng (5612886) 19970300
Barto et al. (6725113) 20040400
Wu et al. (7054703) 20060500
Chi (5751580) 19980500
Baweja et al. (6868298) 20050300
Chua et al. (7174232) 20070200
Huang et al. (7179664) 20070200
Chien (7257454) 20070800
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Snippet A system and method including identifying a stopped range, identifying at least one lot of WIP associated with the stopped range, and processing the at least...
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Title Method and system for improved performance of manufacturing processes
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