Method for adjusting a projection objective

A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an...

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Main Author Emer, Wolfgang
Format Patent
LanguageEnglish
Published 13.05.2008
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Abstract A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized.
AbstractList A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized.
Author Emer, Wolfgang
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References Wegmann et al. (2002/0001088) 20020100
Hamatani et al. (6961115) 20051100
Matsuyama (2004/0042094) 20040300
Hatasawa et al. (5973863) 19991000
(1 231 516) 20020800
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Title Method for adjusting a projection objective
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