Method for adjusting a projection objective
A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an...
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Format | Patent |
Language | English |
Published |
13.05.2008
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Online Access | Get full text |
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Abstract | A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized. |
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AbstractList | A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized. |
Author | Emer, Wolfgang |
Author_xml | – sequence: 1 givenname: Wolfgang surname: Emer fullname: Emer, Wolfgang |
BookMark | eNrjYmDJy89L5WTQ9k0tychPUUjLL1JITMkqLS7JzEtXSFQoKMrPSk0uyczPU8hPArPKUnkYWNMSc4pTeaE0N4OCm2uIs4duaXFBYklqXklxfHpRIogyMDc2NzI1MTUmQgkALC8sKg |
ContentType | Patent |
CorporateAuthor | Carl Zeiss SMT AG |
CorporateAuthor_xml | – name: Carl Zeiss SMT AG |
DBID | EFH |
DatabaseName | USPTO Issued Patents |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EFH name: USPTO Issued Patents url: http://www.uspto.gov/patft/index.html sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
ExternalDocumentID | 07372545 |
GroupedDBID | EFH |
ID | FETCH-uspatents_grants_073725453 |
IEDL.DBID | EFH |
IngestDate | Sun Mar 05 22:30:37 EST 2023 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-uspatents_grants_073725453 |
OpenAccessLink | https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7372545 |
ParticipantIDs | uspatents_grants_07372545 |
PatentNumber | 7372545 |
PublicationCentury | 2000 |
PublicationDate | 20080513 |
PublicationDateYYYYMMDD | 2008-05-13 |
PublicationDate_xml | – month: 05 year: 2008 text: 20080513 day: 13 |
PublicationDecade | 2000 |
PublicationYear | 2008 |
References | Wegmann et al. (2002/0001088) 20020100 Hamatani et al. (6961115) 20051100 Matsuyama (2004/0042094) 20040300 Hatasawa et al. (5973863) 19991000 (1 231 516) 20020800 |
References_xml | – year: 20020800 ident: 1 231 516 – year: 19991000 ident: 5973863 contributor: fullname: Hatasawa et al. – year: 20020100 ident: 2002/0001088 contributor: fullname: Wegmann et al. – year: 20040300 ident: 2004/0042094 contributor: fullname: Matsuyama – year: 20051100 ident: 6961115 contributor: fullname: Hamatani et al. |
Score | 2.7082849 |
Snippet | A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters... |
SourceID | uspatents |
SourceType | Open Access Repository |
Title | Method for adjusting a projection objective |
URI | https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7372545 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LSwMxEB7aIqgnRcX6IgdvEt2Y3XQ9S5dFqPSg0FvJs1A0W7pb_Pud2S3Fi14TGCYJmflm-GYG4F6rIKV7Njx3QfHUp4ITyufC6iwo6eXIUh5y8q7Kz_Rtls16UO5rYb7xG_EV6lI_bupVU7XkSjTv3cPzrvkz9QiM1H3gJ35V2k1deKJxK4gG-tDPE6J2jYvyGA5RBEK22NS_nEZxAgfTdvUUej6ewcOkHdbMECUy7ZY0RSsumGa7XAjeD6vMsrM_58CK8cdryfeS54s1MVbmyU4DeQEDjNz9JTAnQyJcoq3KMepCIOL9yARhrH2h2gkzhOGfYq7-2buGo462kHEhb2DQrDf-Fn1jY-7ag28BSIJvhw |
link.rule.ids | 230,309,786,808,891,64394 |
linkProvider | USPTO |
linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8MwDLbGQDxOIECMZw7cUKAhbTbOsKo8NvUA0m5VnpMmSKe1E38fp50mLnBNJMtyFPuzZX8GuJbCcW7uFR0YJ2hsY0YDyqdMy8QJbnlfhzrkaCyyj_hlkkw6kK1nYb7wG9E56lLdLqt5XTbNleje24enLflz4Aj0gX3g23-W0uTG3YV1K4gGNmAzxNjAoj9Msz3YQSEI2nxd_Qob6T5s5c3pAXSsP4SbUbOumSBOJNLMwh4tPyWSrKohaCFSqlnrgY6ApMP3x4yuJRfTRehZKaKVDvwYupi72xMghruImUhqMcC8C6GItX3lmNL6IUxPqB70_hRz-s_dFWznT2nx9jx-PYPdtochoYyfQ7deLO0FBspaXTY2-AHsbnKB |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Method+for+adjusting+a+projection+objective&rft.inventor=Emer%2C+Wolfgang&rft.number=7372545&rft.date=2008-05-13&rft.externalDBID=n%2Fa&rft.externalDocID=07372545 |