Method for producing a photodiode contact for a TFA image sensor

The invention relates to a method for producing a photodiode contact for a TFA image sensor which includes a photodiode, produced by deposition of a multilayer system and a transparent conductive contact layer on an ASIC circuit that has been coated with an intermediate metal dielectric component an...

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Bibliographic Details
Main Authors Rieve, Peter, Seibel, Konstantin, Wagner, Michael
Format Patent
LanguageEnglish
Published 16.10.2007
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