Method and its apparatus for inspecting particles or defects of a semiconductor device

Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection app...

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Bibliographic Details
Main Authors	Nishiyama, Hidetoshi, Noguchi, Minori, Ooshima, Yoshimasa, Hamamatsu, Akira, Watanabe, Kenji, Watanabe, Tetsuya, Jingu, Takahiro
Format	Patent
Language	English
Published	14.08.2007
Online Access	Get full text

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