Electro-optical device and method of manufacturing the same comprising an interlayer insulating film having a multi-layered structure

To provide an electro-optical device capable of reducing the likelihood of preventing moisture from permeating into a laminated structure formed on a substrate, in particular, thin film transistors that constitute the laminated structure and of performing a stable operation, and/or electro-optical d...

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Bibliographic Details
Main Author Fukuhara, Keiji
Format Patent
LanguageEnglish
Published 08.05.2007
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