Method and apparatus for measuring electrical properties in torsional resonance mode

• Main Authors: Huang, Lin, Su, Chanmin
• Format: Patent
• Language: English
• Published: 02.01.2007

The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc....