Method and apparatus for measuring electrical properties in torsional resonance mode

The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc....

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Main Authors Huang, Lin, Su, Chanmin
Format Patent
LanguageEnglish
Published 02.01.2007
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Abstract The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
AbstractList The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
Author Su, Chanmin
Huang, Lin
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References Elings et al. (5266801) 19931100
Martin et al. (5347854) 19940900
Abraham et al. (5267471) 19931200
Yamanaka (6006593) 19991200
Mancevski et al. (2002/0121131) 20020900
Yagi et al. (6100524) 20000800
Stowe et al. (6489776) 20021200
Toda et al. (5386720) 19950200
Bayer et al. (5646339) 19970700
Degertekin et al. (6694817) 20040200
Elings et al. (5412980) 19950500
Yamanaka (5503010) 19960400
Massie (6590208) 20030700
Miller et al. (6000280) 19991200
Hansma et al. (RE34489) 19931200
Gupta et al. (6552339) 20030400
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Snippet The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a...
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Title Method and apparatus for measuring electrical properties in torsional resonance mode
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