MEMS tunable capacitor based on angular vertical comb drives

• Main Authors: Wu, Ming C, Nguyen, Hung D, Hah, Doo-Young, Patterson, Pamela R
• Format: Patent
• Language: English
• Published: 01.08.2006

A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb...