Electronic circuit

• Main Authors: Miyazaki, Minoru, Murakami, Akane, Cui, Baochun, Yamamoto, Mutsuo
• Format: Patent
• Language: English
• Published: 13.06.2006

An electronic circuit formed on an insulating substrate and having thin-film transistors (TFTs) comprising semiconductor layers. The thickness of the semiconductor layer is less than 1500 Å, e.g., between 100 and 750 Å. A first layer consisting mainly of titanium and nitrogen is formed on the semico...