Capacitor including a dielectric layer having an inhomogeneous crystalline region and method of fabricating the same

• Main Authors: Jeong, Yong-kuk, Lee, Jung-Hyoung, Won, Seok-Jun, Kwon, Dae-Jin, Kim, Weon-Hong, Song, Min-woo
• Format: Patent
• Language: English
• Published: 21.02.2006

In a capacitor, and a method of fabricating the same, the capacitor includes a lower electrode, a dielectric layer on the lower electrode, and an upper electrode on the dielectric layer, wherein the dielectric layer includes a lower dielectric region contacting the lower electrode, an upper dielectr...