Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method

There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for illuminating a plane of mask or reticle on which a pattern is draw, a position of an incidence plane of the opt...

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Main Author Terashi, Takaaki
Format Patent
LanguageEnglish
Published 23.08.2005
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Abstract There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for illuminating a plane of mask or reticle on which a pattern is draw, a position of an incidence plane of the optical integrator and a position of the plane to be illuminated being arranged optically conjugate with each other, and a device for forming an optical characteristic distribution of light at the incidence plane, the light entering at least part of the multiple optical systems, whereby different areas on the plane of plane to be illuminated can be illuminated under different illumination conditions.
AbstractList There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for illuminating a plane of mask or reticle on which a pattern is draw, a position of an incidence plane of the optical integrator and a position of the plane to be illuminated being arranged optically conjugate with each other, and a device for forming an optical characteristic distribution of light at the incidence plane, the light entering at least part of the multiple optical systems, whereby different areas on the plane of plane to be illuminated can be illuminated under different illumination conditions.
Author Terashi, Takaaki
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References Yasuzato (5644390) 19970700
(WO00/11706) 20000300
Notice of Reasons for Rejection (English Translation of Japanese Office Action) mailed Sep. 14, 2004.
(10-319321) 19981200
(1-114035) 19890500
Mulkens et al. (6452662) 20020900
Gallatin et al. (6259513) 20010700
Komatsuda et al. (6049374) 20000400
(9-160219) 19970600
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Snippet There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for...
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Title Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method
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