Reduced friction lift pin

• Main Authors: Or, David T, Koai, Keith K, Takahama, Hiroyuki, Ito, Takahiro, Ota, Koji, Sato, Hiroshi
• Format: Patent
• Language: English
• Published: 03.05.2005

A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide...