Reduced friction lift pin

A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide...

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Bibliographic Details
Main Authors Or, David T, Koai, Keith K, Takahama, Hiroyuki, Ito, Takahiro, Ota, Koji, Sato, Hiroshi
Format Patent
LanguageEnglish
Published 03.05.2005
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Summary:A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.