Resonator arrangement for bandwidth control

• Main Authors: Aab, Konstantin, Kleinschmidt, Juergen, Lokai, Peter, Ulrich, Matthias
• Format: Patent
• Language: English
• Published: 15.02.2005

A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator incl...