Method to obtain contamination free laser mirrors and passivation of these

The present invention relates to a method to obtain contamination free laser mirrors and passivation using dry etching and deposition. A method to obtain contamination free surfaces of a material chosen from the group comprising GaAs, GaAlAs, InGaAs, InGaAsP and InGaAs at crystal mirror facets for G...

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Bibliographic Details
Main Authors Lindström, L. Karsten V, Blixt, N. Peter, Söderholm, Svante H, Srinivasan, Anand, Carlström, Carl-Fredrik
Format Patent
LanguageEnglish
Published 02.11.2004
Online AccessGet full text

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