Device and method for exhaust air processing, in particular, for clean room devices
1. Field of the Invention A device for exhaust air processing of clean rooms has a least one fresh air supply and at least one exhaust air device connected to a work room. At least one processing device is arranged in the work room. At least one supply line and at least one exhaust air line are conn...
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| Format | Patent |
| Language | English |
| Published |
26.10.2004
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| Online Access | Get full text |
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| Summary: | 1. Field of the Invention
A device for exhaust air processing of clean rooms has a least one fresh air supply and at least one exhaust air device connected to a work room. At least one processing device is arranged in the work room. At least one supply line and at least one exhaust air line are connected to the processing device. At least one first filter is arranged in the at least one exhaust air line of the processing device, wherein the at least one exhaust air line is connected at least to one of the supply line of the processing device and the fresh air supply line of the work room. |
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